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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 36 — Dec. 20, 2003
  • pp: 7174–7178

Reflow technique for the fabrication of an elliptical microlens array in sol-gel material

Miao He, Xiaocong Yuan, Nam Q. Ngo, Wai C. Cheong, and Jing Bu  »View Author Affiliations


Applied Optics, Vol. 42, Issue 36, pp. 7174-7178 (2003)
http://dx.doi.org/10.1364/AO.42.007174


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Abstract

A simple reflow technique is employed for the fabrication of elliptical refractive microlens arrays (MLAs) on a low-cost inorganic-organic SiO2/ZrO2 sol-gel glass. The measured results show that the fabricated elliptical microlenses in a 256 × 512 array have excellent surface and dimensional qualities in terms of smoothness and uniformity. It is also shown that the optical parameters of the MLAs, such as the focal length and aperture dimension, can be accurately controlled. The proposed technique requires only an ordinary binary photomask for pattern transfer. Furthermore, the sol-gel material is found to be feasible for high-volume production, because the fabrication of MLAs can be implemented by use of cheap sol-gel materials without an etching step.

© 2003 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

History
Original Manuscript: September 4, 2003
Revised Manuscript: September 4, 2003
Published: December 20, 2003

Citation
Miao He, Xiaocong Yuan, Nam Q. Ngo, Wai C. Cheong, and Jing Bu, "Reflow technique for the fabrication of an elliptical microlens array in sol-gel material," Appl. Opt. 42, 7174-7178 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-36-7174

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