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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 4 — Feb. 1, 2003
  • pp: 621–626

Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators

Chee Wei Wong, Yongbae Jeon, George Barbastathis, and Sang-Gook Kim  »View Author Affiliations


Applied Optics, Vol. 42, Issue 4, pp. 621-626 (2003)
http://dx.doi.org/10.1364/AO.42.000621


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Abstract

We present a microfabricated grating whose period can be tuned in analog fashion to within a fraction of a nanometer. The tunable angular range is more than 400 µrad in the first diffracted order. The design concept consists of a diffractive grating defined onto a 400-nm membrane, with the membrane subsequently strained in the direction perpendicular to the grating grooves by thin-film piezoelectric actuation. The strain-tuned grating device was fabricated with microelectromechanical processes, utilizing both surface and bulk micromachining. The fabricated piezoelectric film achieved a measured dielectric constant of 1200. Device characterization yielded grating period changes up to 8.3 nm (0.21% strain in the membrane) at 10 V and a diffracted angular change of 486 µrad, in good agreement with the theory. Uniformity across the actuated grating and out-of-plane deflections are characterized and discussed.

© 2003 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(050.1950) Diffraction and gratings : Diffraction gratings
(160.2260) Materials : Ferroelectrics
(230.3990) Optical devices : Micro-optical devices

History
Original Manuscript: June 27, 2002
Revised Manuscript: November 6, 2001
Published: February 1, 2003

Citation
Chee Wei Wong, Yongbae Jeon, George Barbastathis, and Sang-Gook Kim, "Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators," Appl. Opt. 42, 621-626 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-4-621


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