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Applied Optics

Applied Optics


  • Vol. 42, Iss. 4 — Feb. 1, 2003
  • pp: 667–673

Red-green-blue interferometer for the metrology of discontinuous structures

Andreas Pförtner and Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 42, Issue 4, pp. 667-673 (2003)

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Discontinuous surface profiles, e.g., diffractive optical elements (DOEs), are commonly measured by white-light interferometry. White-light interferometry needs significantly more memory capacity and computer time than does phase-shifting interferometry; there are approximately ten times more frames to be taken to gather the required information about the object under test. But usually the grooves of the DOEs are too deep for single-wavelength phase-shifting interferometry. Here we show how phase-shifting techniques can be applied to DOEs. For this purpose three interference patterns are recorded simultaneously by a three-chip color CCD camera at three wavelengths (Red-green-blue). It is possible to calculate separately the optical path difference at each pixel from the three phase patterns modulo 2π. The algorithms used and experimental results are presented.

© 2003 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

Original Manuscript: July 3, 2002
Revised Manuscript: October 17, 2002
Published: February 1, 2003

Andreas Pförtner and Johannes Schwider, "Red-green-blue interferometer for the metrology of discontinuous structures," Appl. Opt. 42, 667-673 (2003)

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