Discontinuous surface profiles, e.g., diffractive optical elements (DOEs), are commonly measured by white-light interferometry. White-light interferometry needs significantly more memory capacity and computer time than does phase-shifting interferometry; there are approximately ten times more frames to be taken to gather the required information about the object under test. But usually the grooves of the DOEs are too deep for single-wavelength phase-shifting interferometry. Here we show how phase-shifting techniques can be applied to DOEs. For this purpose three interference patterns are recorded simultaneously by a three-chip color CCD camera at three wavelengths (Red-green-blue). It is possible to calculate separately the optical path difference at each pixel from the three phase patterns modulo 2π. The algorithms used and experimental results are presented.

© 2003 Optical Society of America

[Optical Society of America ]

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Laser surface profiler (OL)
• Testing of Rod Objects by Grazing-Incidence Interferometry: Experiment (AO)
• Spatiotemporal Phase Unwrapping for the Measurement of Discontinuous Objects in Dynamic Fringe-Projection Phase-Shifting Profilometry (AO)
• Digital Speckle-Pattern Interferometry: Fringe Retrieval for Large In-Plane Deformations With Digital Speckle Photography (AO)
• Talbot Interferometry in the Measurement of the Refractive Indices of a Doubly Refracting Crystal (AO)

Related Conference Papers

• Metrology for the Space Interferometry Mission
• High Sensitivity Vibration Measurements with Absolute Calibration
• Application of Frequency Combs for Precision Measurement of Refractive Index of Air
• High Flux Atom Lasers, Interferometry and the Shot Noise Limit
• Ultra Stable Semiconductor Laser Current Source