Ion-beam sputtering deposition has been used in two ways, as granular multilayers and as cosputtered film, to elaborate Ag-Si<sub>3</sub>N<sub>4</sub> nanocermets. Multilayer deposition creates slightly oblate clusters, and cosputtering produces two cluster families: elongated clusters within the Si<sub>3</sub>N<sub>4</sub> matrix and larger ones at the film surface. The transmittance spectra of these nanocermets are characterized by a surface plasmon resonance. In the reported research the position of this resonance is related to the morphological properties of silver nanoclusters, which are studied by transmission-electron microscopy, grazing-incidence small-angle x-ray scattering, and atomic-force microscopy.
© 2003 Optical Society of America
(160.4760) Materials : Optical properties
(240.6680) Optics at surfaces : Surface plasmons
(260.3910) Physical optics : Metal optics
(260.5740) Physical optics : Resonance
(310.6860) Thin films : Thin films, optical properties
Sophie Camelio, David Babonneau, Thierry Girardeau, Johann Toudert, Florence Lignou, Marie-Françoise Denanot, Nicolas Maître, Angel Barranco, and Philippe Guérin, "Optical and Structural Properties of Ag-Si3N4 Nanocermets Prepared by Means of Ion-beam Sputtering in Alternate and Codeposition Modes," Appl. Opt. 42, 674-681 (2003)