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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 4 — Feb. 1, 2003
  • pp: 682–690

Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement

Dalip Singh Mehta, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa  »View Author Affiliations


Applied Optics, Vol. 42, Issue 4, pp. 682-690 (2003)
http://dx.doi.org/10.1364/AO.42.000682


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Abstract

The maximum measurable range of a spectral interference microscope depends on the coherence length of the light transmitted by its tunable spectral filter. To achieve a large range in step-height measurement we have developed a new tunable spectral filter that uses tandem liquid-crystal Fabry-Perot interferometers (LC-FPIs), which can simultaneously attain both a high spectral resolution and a large tuning range. Fringe visibility measurements were carried out, and it was found that the coherence length of the light transmitted through tandem LC-FPIs is two times larger than that transmitted through a single LC-FPI. Using this novel tunable spectral filter, we developed a new spectral interference microscope for the measurement of three-dimensional shapes of discontinuous objects. Experimental results of step-height measurements both with a single LC-FPI and with tandem LC-FPIs are presented for a combination of standard steel gauge block sets with 1-, 99-, and 100-µm steps. A large range (1–100 µm) of measurement with submicrometer resolution was achieved with tandem LC-FPIs that was not possible with our previous system in which a single LC-FPI was used.

© 2003 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

History
Original Manuscript: May 14, 2002
Revised Manuscript: September 30, 2002
Published: February 1, 2003

Citation
Dalip Singh Mehta, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa, "Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement," Appl. Opt. 42, 682-690 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-4-682

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