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Applied Optics

Applied Optics


  • Vol. 42, Iss. 4 — Feb. 1, 2003
  • pp: 682–690

Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement

Dalip Singh Mehta, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa  »View Author Affiliations

Applied Optics, Vol. 42, Issue 4, pp. 682-690 (2003)

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The maximum measurable range of a spectral interference microscope depends on the coherence length of the light transmitted by its tunable spectral filter. To achieve a large range in step-height measurement we have developed a new tunable spectral filter that uses tandem liquid-crystal Fabry-Perot interferometers (LC-FPIs), which can simultaneously attain both a high spectral resolution and a large tuning range. Fringe visibility measurements were carried out, and it was found that the coherence length of the light transmitted through tandem LC-FPIs is two times larger than that transmitted through a single LC-FPI. Using this novel tunable spectral filter, we developed a new spectral interference microscope for the measurement of three-dimensional shapes of discontinuous objects. Experimental results of step-height measurements both with a single LC-FPI and with tandem LC-FPIs are presented for a combination of standard steel gauge block sets with 1-, 99-, and 100-µm steps. A large range (1–100 µm) of measurement with submicrometer resolution was achieved with tandem LC-FPIs that was not possible with our previous system in which a single LC-FPI was used.

© 2003 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Original Manuscript: May 14, 2002
Revised Manuscript: September 30, 2002
Published: February 1, 2003

Dalip Singh Mehta, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa, "Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement," Appl. Opt. 42, 682-690 (2003)

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  1. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, T. Kurokawa, “Optical frequency-domain microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device,” Appl. Opt. 38, 7063–7068 (1999). [CrossRef]
  2. M. Takeda, H. Ina, S. Kobayashi, “Fourier transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1982). [CrossRef]
  3. B. S. Lee, T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990). [CrossRef] [PubMed]
  4. T. Dressel, G. Hausler, H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  5. L. Deck, P. De Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef] [PubMed]
  6. M. Suematsu, M. Takeda, “Wavelength-shift interferometry for distance measurements using the Fourier transform technique for fringe analysis,” Appl. Opt. 30, 4046–4055 (1991). [CrossRef] [PubMed]
  7. M. Takeda, H. Yamamoto, “Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33, 7829–7837 (1994). [CrossRef] [PubMed]
  8. T. H. Barnes, T. Eiju, K. Matsuda, “Rough surface profile measurement using speckle optical frequency domain reflectometry with an external cavity tunable diode laser,” Optik 103, 93–100 (1996).
  9. H. J. Tiziani, B. Franze, P. Haible, “Wavelength-shift speckle interferometry for absolute profilometry using mode-hope free external cavity diode laser,” J. Mod. Opt. 44, 1485–1496 (1997). [CrossRef]
  10. S. Kuwamura, I. Yamaguchi, “Wavelength scanning profilometry for real-time surface shape measurement,” Appl. Opt. 36, 4473–4482 (1997). [CrossRef] [PubMed]
  11. A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, H. Tashiro, “Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti:sapphire laser,” Opt. Rev. 8, 59–63 (2001). [CrossRef]
  12. D. S. Mehta, M. Sugai, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, T. Yoshizawa, “Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging using spectral interferometric microscope,” Appl. Opt. 41, 3874–3885 (2002). [CrossRef] [PubMed]
  13. K. Hirabayashi, H. Tsuda, T. Kurokawa, “Tunable wavelength-selective liquid-crystal filters for 600-channel FDM system,” IEEE Photon. Technol. Lett. 4, 597–599 (1992). [CrossRef]
  14. J. S. Patel, M. A. Saifi, D. W. Berreman, C. Lin, N. Andreadakis, “An electrically tunable optical filter for infra-red wavelength using liquid crystals in a Fabry-Perot etalon,” Appl. Phys. Lett. 57, 1718–1720 (1990). [CrossRef]
  15. K. Hirabayashi, H. Tsuda, T. Kurokawa, “Narrow-band tunable wavelength-selective filters of Fabry-Perot interferometers with a liquid crystal intracavity,” IEEE Photon. Technol. Lett. 3, 213–215 (1991). [CrossRef]
  16. H. Tsuda, K. Hirabayashi, T. Tohmori, T. Kurokawa, “Tunable light source using a liquid-crystal Fabry-Perot interferometer,” IEEE Photon. Technol. Lett. 3, 504–506 (1991). [CrossRef]
  17. K. Hirabayashi, H. Tsuda, T. Kurokawa, “Tunable liquid-crystal Fabry-Perot interferometer filter for wavelength-division multiplexing communication systems,” J. Lightwave Technol. 11, 2033–2043 (1993). [CrossRef]
  18. M. Born, E. Wolf, Principles of Optics, 5th ed. (Pergamon, New York, 1999), Chap. 10, p. 175.

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