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Applied Optics

Applied Optics


  • Vol. 42, Iss. 7 — Mar. 1, 2003
  • pp: 1296–1305

Spectral Interference Mirau Microscope with an Acousto-Optic Tunable Filter for Three-Dimensional Surface Profilometry

Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa  »View Author Affiliations

Applied Optics, Vol. 42, Issue 7, pp. 1296-1305 (2003)

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A nonmechanical scanning Mirau-type spectral interference microscope has been developed for the measurement of three-dimensional surface profiles of discontinuous objects. An acousto-optic tunable filter (AOTF) is used as a high-resolution spectral filter, which scans the optical frequency of the broadband light emitted from a superluminescent diode. To generate spectral fringes that make full use of the limited coherence length of the filtered light we unbalanced the Mirau interferometric system by positioning the reference mirror nearly halfway between the top and the bottom of the step height. When the frequency of the broadband light source is scanned by an AOTF, the interference fringes move in opposite directions on the top and the bottom of the object. To uniquely determine the sign of the fringe movement over the large area of the object, we developed a three-dimensional Fourier-transform technique, and from the detected sign of the fringe movement and phase information, we determined the three-dimensional step height. Experimental results of the measurement of 100-μm step height are presented. The main advantages of the proposed system are that it provides nonmechanical scanning and a large measurement range without ambiguity in the sign of the phase.

© 2003 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa, "Spectral Interference Mirau Microscope with an Acousto-Optic Tunable Filter for Three-Dimensional Surface Profilometry," Appl. Opt. 42, 1296-1305 (2003)

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  1. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990).
  2. T. Dressel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992).
  3. B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by Mirau interferometry,” Appl. Opt. 24, 1489–1497 (1985).
  4. G. S. Kino and S. S. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990).
  5. P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms,” Opt. Lett. 18, 1462–1464 (1993).
  6. P. Caber, “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993).
  7. L. Deck and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994).
  8. P. de Groot and L. Deck, “Surface profiling by analysis of white light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).
  9. P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
  10. A. Dubois, L. Vabre, and A. C. Boccara, “Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery,” Opt. Lett. 26, 1873–1875 (2001).
  11. B. K. A. Ngoi, K. Venkatakrishnan, and N. R. Sivakumar, “Phase-shifting interferometry immune to vibration,” Appl. Opt. 40, 3211–3214 (2001).
  12. M. Takeda and H. Yamamoto, “Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33, 7829–7837 (1994).
  13. S. Kuwamura and I. Yamaguchi, “Wavelength scanning profilometry for real-time surface shape measurement,” Appl. Opt. 36, 4473–4482 (1997).
  14. T. H. Barnes, T. Eiju, and K. Matsuda, “Rough surface profile measurement using speckle optical frequency domain reflectometry with an external cavity tunable diode laser,” Optik 103, 93–100 (1996).
  15. H. J. Tiziani, B. Franze, and P. Haible, “Wavelength-shift speckle interferometry for absolute profilometry using mode-hope free external cavity diode laser,” J. Mod. Opt. 44, 1485–1496 (1997).
  16. A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, “Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti:sapphire laser,” Opt. Rev. 8, 59–63 (2001).
  17. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, “Optical frequency-domain microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device,” Appl. Opt. 38, 7063–7068 (1999).
  18. D. S. Mehta, M. Sugai, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, and T. Yoshizawa, “Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging using spectral interferometric microscope,” Appl. Opt. 41, 3874–3885 (2002).
  19. D. S. Mehta, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, and T. Yoshizawa, “Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement,” Appl. Opt. 42, 682–690 (2003).
  20. S. E. Harris and R. W. Wallace, “Acousto-optic tunable filter,” J. Opt. Soc. Am. 59, 744–750 (1969).
  21. I. C. Chang, “Noncollinear acousto-optic filter with large angular aperture,” Appl. Phys. Lett. 25, 370–372 (1974).
  22. G. Georgiev, D. A. Glenar, and J. J. Hillman, “Spectral characterization of acousto-optic filters used in imaging spectroscopy,” Appl. Opt. 41, 209–217 (2002).
  23. http://www.brimrose.com/ao_devices.html.
  24. Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).
  25. M. Takeda, H. Ina, and S. Kobayashi, “Fourier transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1982).

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