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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 7 — Mar. 1, 2003
  • pp: 1325–1329

Use of Information on the Manufacture of Samples for the Optical Characterization of Multilayers Through a Global Optimization

Jordi Sancho-Parramon, Josep Ferré-Borrull, Salvador Bosch, and Maria Christina Ferrara  »View Author Affiliations


Applied Optics, Vol. 42, Issue 7, pp. 1325-1329 (2003)
http://dx.doi.org/10.1364/AO.42.001325


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Abstract

We present a procedure for the optical characterization of thin-film stacks from spectrophotometric data. The procedure overcomes the intrinsic limitations arising in the numerical determination of many parameters from reflectance or transmittance spectra measurements. The key point is to use all the information available from the manufacturing process in a single global optimization process. The method is illustrated by a case study of solgel applications.

© 2003 Optical Society of America

OCIS Codes
(160.4760) Materials : Optical properties
(160.6060) Materials : Solgel
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

Citation
Jordi Sancho-Parramon, Josep Ferré-Borrull, Salvador Bosch, and Maria Christina Ferrara, "Use of Information on the Manufacture of Samples for the Optical Characterization of Multilayers Through a Global Optimization," Appl. Opt. 42, 1325-1329 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-7-1325


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References

  1. S. Bosch, J. Ferré-Borull, and J. Sancho-Parramon, “A general purpose software for optical characterisation of thin films: Specific features for microelectronic applications,” Solid-State Electron. 45, 703–709 (2001).
  2. H. A. Macleod, Thin Film Optical Filters (Wiley, New York, 1976).
  3. S. Bosch, N. Leinfellner, E. Quesnel, A. Duparré, J. Ferré-Borrull, S. Guenster, and D. Ristau, “New procedure for the optical characterization of high-quality thin films,” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, G. A. Al-Jumaily, A. Duparré, and B. Singh, eds., Proc. SPIE 4099, 124–130 (2000).
  4. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C (Cambridge University Press, New York, 1992).
  5. M. C. Ferrara, S. Mazzarelli, J. Sancho-Parramon, and S. Bosch. “Sol-gel process for the production of large area coatings,” presented at the III Workshop Italiano Sol-Gel, Trento, Italy, 13–14 June 2002.
  6. C. J. Brinker and G. W. Scherer, The Physics and the Chemistry of Sol-gel Processing (Academic, New York, 1990).

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