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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 10 — Apr. 1, 2004
  • pp: 2046–2053

Calibration method for measurement of linear nanometric distances by scattered total internal reflection

Corley W. Strunk and Paul J. Sides  »View Author Affiliations


Applied Optics, Vol. 43, Issue 10, pp. 2046-2053 (2004)
http://dx.doi.org/10.1364/AO.43.002046


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Abstract

Scattered total internal reflection of visible light is used to measure linear nanometric distance to as small as 10 nm. Specifically, we measure the height of magnetic transducer heads above a rotating glass disk. A breakthrough in the approach to calibration, based on combining the second derivative of the transmittance of the scattered light and parameter fitting, substantially improves the quality of the measurement relative to previous demonstrations of this method. The results agree to 1 nm with an industry-standard three-color interferometer to and including the lowest values measured. The technique in principle remains robust to as low as the zero height. Furthermore the calibration point can be as low as 10 nm, which is especially attractive in practice.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements

History
Original Manuscript: November 3, 2003
Revised Manuscript: January 5, 2004
Published: April 1, 2004

Citation
Corley W. Strunk and Paul J. Sides, "Calibration method for measurement of linear nanometric distances by scattered total internal reflection," Appl. Opt. 43, 2046-2053 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-10-2046


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References

  1. E. Hotaling, “Measuring flying height in an era of near-contact recording,” Data Storage 3, 41–46 (1996).
  2. B. Bhushan, Tribology and Mechanics of Magnetic Storage Devices, 2nd ed. (Springer-Verlag, New York, 1996). [CrossRef]
  3. Z.-M. Yuan, B. Liu, S. Hu, Q. Leng, Q. Chen, “Scanning carrier current method for in situ measurement of flying height variation,” IEEE Trans. Magn. 37, 1814–1817 (2001). [CrossRef]
  4. C. Lacey , “ Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings ,” U.S. patent5,280,340 (18January1994).
  5. C. Lacey, E. W. Russ , “Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings,” U.S. patent5,457,534 (10October1995).
  6. Y. Li, A. Menon, “Flying height measurement metrology for ultralow spacing in rigid magnetic recording,” IEEE Trans. Magn. 32, 129–134 (1996). [CrossRef]
  7. P. de Groot, “Optical gap measuring apparatus and method,” U.S. patent5,557,399 (17September1996.
  8. P. de Groot, L. Deck, J. Soobitsky, J. Biegen, “Polarization interferometer for measuring the flying height of magnetic read-write heads,” Opt. Lett. 21, 441–443 (1996). [CrossRef] [PubMed]
  9. J. J. Wallace, J. R. Pavlat, “Flying height testing at near contact,” Data Storage 9, 55–58 (1995).
  10. W. Clegg, X. Liu, B. Liu, A. Li, C. Chon, D. Jenkins, “Normal-incidence polarization interferometry flying height testing,” IEEE Trans. Magn. 37, 1941–1943 (2001). [CrossRef]
  11. X. Liu, W. Clegg, B. Liu, “Normal-incidence polarization interferometry for measuring flying height of magnetic heads,” IEEE Trans. Magn. 35, 2457–2459 (1999). [CrossRef]
  12. X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000). [CrossRef]
  13. P. J. Sides , “Apparatus and method for measuring linear nanometric distances using evanescent radiation,” U.S. patent5,715,060 (3February1998).
  14. P. J. Sides, J. L. Lo, “Measurement of linear nanometric distances between smooth plane parallel bodies by scattered total internal reflection,” Appl. Phys. Lett. 69, 141–142 (1996). [CrossRef]
  15. J. L. Lo, P. J. Sides, “Measurement of fly height by scattered total internal reflection,” J. Appl. Phys. 81, 5381–5383 (1997). [CrossRef]
  16. C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000). [CrossRef]
  17. H. Chew, D.-S. Wang, M. Kerker, “Elastic scattering of evanescent electromagnetic waves,” Appl. Opt. 18, 2679–2687 (1979). [CrossRef] [PubMed]
  18. I. Court, F. K. von Willisen, “Frustrated total internal reflection and application of its principle to laser cavity design,” Appl. Opt. 3, 719–726 (1964). [CrossRef]
  19. D. C. Prieve, “Measurement of colloidal forces with TIRM,” Adv. Colloid Interface Sci. 82, 93–125 (1999). [CrossRef]
  20. D. C. Prieve, J. Y. Walz, “Scattering of an evanescent surface wave by a microscopic dielectric sphere,” Appl. Opt. 32, 1629–1641 (1993). [CrossRef] [PubMed]
  21. W. N. Hansen, “Internal reflection spectroscopy in electrochemistry,” in Advances in Electrochemistry and Electrochemical Engineering (Wiley, New York, 1973), pp. 1–226.
  22. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (Elsevier, Amsterdam, 1987), pp. 269–363.
  23. C. W. Strunk, C. C. Zahn, P. J. Sides, “Comparison of the phase metrics DFHT IV and Zygo Pegasus 2000 FH testers,” Appl. Opt. 40, 4507–4513 (2001). [CrossRef]
  24. P. de Groot, “Birefringence in rapidly rotating glass disks,” J. Opt. Soc. Am. A 15, 1202–1211 (1998). [CrossRef]
  25. P. de Groot, “Optical properties of alumina titanium carbide sliders used in rigid disk drives,” Appl. Opt. 37, 6654–6663 (1998). [CrossRef]

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