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Applied Optics

Applied Optics


  • Vol. 43, Iss. 11 — Apr. 10, 2004
  • pp: 2332–2336

Correlation between oxygen-deficient center formation and volume compaction in synthetic SiO2 glass upon ArF or F2 excimer-laser irradiation

Yoshiaki Ikuta, Koichi Kajihara, Masahiro Hirano, and Hideo Hosono  »View Author Affiliations

Applied Optics, Vol. 43, Issue 11, pp. 2332-2336 (2004)

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Correlations between the refractive-index change and the concentration of an oxygen-deficient center (ODC) induced by thermal treatments and laser irradiation are examined to clarify the origin of laser-induced volume compaction in synthetic SiO2 glasses. A linear correlation between them was clearly observed for thermally induced ODC, whereas no correlation was found for ArF or F2 laser irradiation. The results demonstrate that the dominant origin of laser-induced compaction is not ODC formation. Furthermore, we found that the presence of H2 in SiO2 glass had no influence on volume compaction but enhanced crack formation upon laser irradiation, a phenomenon most likely due to stress corrosion.

© 2004 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3330) Lasers and laser optics : Laser damage
(160.2750) Materials : Glass and other amorphous materials

Original Manuscript: July 10, 2003
Revised Manuscript: November 17, 2003
Published: April 10, 2004

Yoshiaki Ikuta, Koichi Kajihara, Masahiro Hirano, and Hideo Hosono, "Correlation between oxygen-deficient center formation and volume compaction in synthetic SiO2 glass upon ArF or F2 excimer-laser irradiation," Appl. Opt. 43, 2332-2336 (2004)

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