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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 15 — May. 20, 2004
  • pp: 3028–3036

Total internal reflection ellipsometry: principles and applications

Hans Arwin, Michal Poksinski, and Knut Johansen  »View Author Affiliations


Applied Optics, Vol. 43, Issue 15, pp. 3028-3036 (2004)
http://dx.doi.org/10.1364/AO.43.003028


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Abstract

A concept for a measurement technique based on ellipsometry in conditions of total internal reflection is presented. When combined with surface plasmon resonance (SPR) effects, this technique becomes powerful for monitoring and analyzing adsorption and desorption on thin semitransparent metal films as well as for analyzing the semitransparent films themselves. We call this technique total internal reflection ellipsometry (TIRE). The theory of ellipsometry under total internal reflection combined with SPR is discussed for some simple cases. For more advanced cases and to prove the concept, simulations are performed with the Fresnel formalism. The use of TIRE is exemplified by applications in protein adsorption, corrosion monitoring, and adsorption from opaque liquids on metal surfaces. Simulations and experiments show greatly enhanced thin-film sensitivity compared with ordinary ellipsometry.

© 2004 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.6680) Optics at surfaces : Surface plasmons
(260.6970) Physical optics : Total internal reflection
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: December 5, 2003
Revised Manuscript: March 3, 2004
Published: May 20, 2004

Citation
Hans Arwin, Michal Poksinski, and Knut Johansen, "Total internal reflection ellipsometry: principles and applications," Appl. Opt. 43, 3028-3036 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-15-3028


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References

  1. R. W. Collins, D. E. Aspnes, E. A. Irene, Thin Solid Films313–314 (1998).
  2. T. E. Tiwald, D. W. Thompson, J. A. Woolam, S. V. Pepper, “Determination of the mid-IR optical constants of water and lubricants using IR ellipsometry combined with an ATR cell,” Thin Solid Films 313–314, 718–721 (1998). [CrossRef]
  3. S. Rekveld, Ellipsometric Studies of Protein Adsorption onto Hard Surfaces in a Flow Cell (Fedobruk, Enschede, 1997).
  4. M. Poksinski, H. Dzuho, J.-O. Järrhed, H. Arwin, “Total internal reflection ellipsometry,” in Proceedings of Eurosensors XIV, R. D. Reus, S. Bouwstra, eds. (Microelectronics Center, Copenhagen, 2000).
  5. P. Westphal, A. Bornmann, “Biomolecular detection by surface plasmon enhanced ellipsometry,” Sens. Actuators B 84, 278–282 (2002). [CrossRef]
  6. Total in this context refers to a situation in which the angle of incidence is larger then the critical angle (in the two-phase situation). If an interface layer is present, total internal reflection rarely occurs. In fact, at an SPR dip, total extinction of the p component may occur. However, to avoid confusion with IR ellipsometry, we prefer the acronym TIRE instead of IRE. Notice that when the angle of incidence is smaller than the critical angle this technique works as well, but there is no enhancement of sensitivity.
  7. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).
  8. M. Schubert, “Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems,” Phys. Rev. B 53, 4265–4274 (1996). [CrossRef]
  9. H. G. Tompkins, W. A. McGahan, Spectroscopic Ellipsometry and Reflectometry: a User’s Guide (Wiley, New York, 1999).
  10. E. Kretschmann, H. Raether, “Radiative decay of nonradiative surface plasmons excited by light,” Z. Naturforsch. 23, 2135–2138 (1968).
  11. M. Poksinski, H. Dzuho, H. Arwin, “Copper corrosion monitoring with total internal reflection ellipsometry,” J. Electrochem. Soc. 150, B536–B539 (2003). [CrossRef]
  12. M. Poksinski, H. Arwin, “In situ monitoring of adsorption from milk on metal surfaces using total internal reflection ellipsometry,” Sens. Actuators B 94, 247–252 (2003). [CrossRef]
  13. E. D. Palik, Handbook of Optical Constants of Solids II, E. D. Palik, ed. (Academic, San Diego, Calif., 1991).
  14. K. Johansen, H. Arwin, I. Lundström, B. Liedberg, “Imaging surface plasmon resonance sensor based on multiple wavelengths: sensitivity considerations,” Rev. Sci. Instrum. 71, 3530–3538 (2000). [CrossRef]
  15. P. Yeh, Optical Waves in Layered Media (Wiley, New York, 1988).
  16. A. Brecht, G. Gauglitz, “Optical probes and transducers,” Biosens. Bioelectron. 10, 923–936 (1995). [CrossRef] [PubMed]
  17. H. Raether, Surface Plasmons on Rough Surfaces and on Gratings (Springer-Verlag, Berlin, 1988).
  18. This selected thickness is close to the SPR-optimized thickness and was chosen only as an example. The best combination of thickness and angle of incidence can be determined by further simulations.
  19. The parameters for this simulation are set to match the settings necessary to generate the SPR effect.
  20. M. Poksinski, H. Arwin, “Protein monolayers monitored by internal reflection ellipsometry,” Thin Solid Films 455-456C, 716–721 (2004). [CrossRef]
  21. J. Mårtensson, H. Arwin, H. Nygren, I. Lundström, “Adsorption and optical properties of ferritin layers on gold studied with spectroscopic ellipsometry,” J. Colloid Interface Sci. 174, 79–85 (1995). [CrossRef]

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