OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 16 — Jun. 1, 2004
  • pp: 3258–3262

Fabrication and Analysis of a Fabry-Perot Cavity with a Micromechanical Wet-Etching Process

Min Xiang, Yan Min Cai, Ya Ming Wu, Jian Yi Yang, and Yue Lin Wang  »View Author Affiliations


Applied Optics, Vol. 43, Issue 16, pp. 3258-3262 (2004)
http://dx.doi.org/10.1364/AO.43.003258


View Full Text Article

Acrobat PDF (226 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a novel low-cost and batch fabrication method to fabricate a Fabry-Perot (FP) cavity with a micromechanical wet-etching process, through which FP cavities can be achieved with a cavity length of from several micrometers to tens of micrometers. The parallelism of mirror elements can be well achieved without electrostatic control. The quality of an etched surface can be greatly improved by the oxidation polish process. FP cavities with a finesse of approximately 50 are achieved. Analysis shows that the effective finesse is dominated mainly by the quality of the etched surface.

© 2004 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(240.5450) Optics at surfaces : Polishing

Citation
Min Xiang, Yan Min Cai, Ya Ming Wu, Jian Yi Yang, and Yue Lin Wang, "Fabrication and Analysis of a Fabry-Perot Cavity with a Micromechanical Wet-Etching Process," Appl. Opt. 43, 3258-3262 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-16-3258

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited