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Applied Optics

Applied Optics


  • Vol. 43, Iss. 19 — Jul. 1, 2004
  • pp: 3812–3816

Heterodyne interferometric system with subnanometer accuracy for measurement of straightness

Chien-ming Wu  »View Author Affiliations

Applied Optics, Vol. 43, Issue 19, pp. 3812-3816 (2004)

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A generalized laser interferometer system based on three design principles, i.e., heterodyne frequency, prevention of mixing, and perfect symmetry, is described. These design principles give rise to an interferometer in a highly stable system with no periodic nonlinearity. A novel straightness sensor, consisting of a straightness prism and a straightness reflector, is incorporated into the generalized system to form a straightness interferometer. A Hewlett-Packard commercial linear interferometer was used to validate the interferometer’s parameters. Based on the present design, the interferometer has a gain of 0.348, a periodic nonlinearity of less than 40 pm, and a displacement noise of 12 pm/Hz at a bandwidth of 7.8 kHz. This system is useful for precision straightness measurements.

© 2004 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

Original Manuscript: January 13, 2004
Revised Manuscript: April 5, 2004
Published: July 1, 2004

Chien-ming Wu, "Heterodyne interferometric system with subnanometer accuracy for measurement of straightness," Appl. Opt. 43, 3812-3816 (2004)

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  1. R. R. Baldwin, “Interferometer system for measuring straightness and roll,” U.S. patent3,790,284 (5February1974).
  2. G. E. Sommargren, P. S. Yang, “Straightness of travel interferometer,” U.S. patent4,787,747 (29November1988).
  3. W. Hou, G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precis. Eng. 14, 91–98 (1992). [CrossRef]
  4. C. M. Wu, C. S. Su, “Nonlinearity in measurements of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996). [CrossRef]
  5. C. M. Wu, R. D. Deslattes, “Analytical modeling of the periodic nonlinearity in heterodyne interferometry,” Appl. Opt. 37, 6696–6700 (1998). [CrossRef]
  6. C. M. Wu, “Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry,” Opt. Commun. 215, 17–23 (2003). [CrossRef]
  7. Y. Gursel, “Laser metrology gauges for OSI,” in Spaceborne Interferometry, R. D. Reasenberg, ed., Proc. SPIE1947, 188–197 (1993). [CrossRef]
  8. M. Tanaka, T. Yamagami, K. Nakayama, “Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels,” IEEE Trans. Instrum. Meas. 38, 552–554 (1989). [CrossRef]
  9. C. M. Wu, S. T. Lin, J. Fu, “Heterodyne interferometer with two spatial-separated polarization beams for nanometrology,” Opt. Quantum Electron. 34, 1267–1276 (2002). [CrossRef]
  10. R. C. Quenelle, “Nonlinearity in interferometer measurements,” Hewlett Packard J. 34, 10–10 (1983).
  11. C. M. Sutton, “Nonlinearity in length measurements using heterodyne laser Michelson interferometry,” J. Phys. E 20, 1290–1292 (1987). [CrossRef]

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