Heterodyne Interferometric System with Subnanometer Accuracy for Measurement of Straightness
Applied Optics, Vol. 43, Issue 19, pp. 3812-3816 (2004)
http://dx.doi.org/10.1364/AO.43.003812
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Abstract
A generalized laser interferometer system based on three design principles, i.e., heterodyne frequency, prevention of mixing, and perfect symmetry, is described. These design principles give rise to an interferometer in a highly stable system with no periodic nonlinearity. A novel straightness sensor, consisting of a straightness prism and a straightness reflector, is incorporated into the generalized system to form a straightness interferometer. A Hewlett-Packard commercial linear interferometer was used to validate the interferometer’s parameters. Based on the present design, the interferometer has a gain of 0.348, a periodic nonlinearity of less than 40 pm, and a displacement noise of 12 pm/√Hz at a bandwidth of 7.8 kHz. This system is useful for precision straightness measurements.
© 2004 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
Citation
Chien-ming Wu, "Heterodyne Interferometric System with Subnanometer Accuracy for Measurement of Straightness," Appl. Opt. 43, 3812-3816 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-19-3812
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