A measurement setup that is capable of measuring the internal transmittance of fused-silica prisms at 193 nm with a precision better than 0.01%/cm (3σ) is presented. Its application to materials and wavelengths other than those that were chosen here for demonstration is straightforward. A lack of any standards makes it impossible to determine the absolute accuracy (also called measurement uncertainty) experimentally; however, calculations indicate that it is almost within the same margin as the precision.
© 2004 Optical Society of America
Original Manuscript: November 20, 2003
Revised Manuscript: April 5, 2004
Published: July 10, 2004
Ulrich Neukirch and Xinghua Li, "High-accuracy measurement of the optical transmittance of optical bulk materials at deep-ultraviolet wavelengths," Appl. Opt. 43, 3978-3982 (2004)