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Applied Optics

Applied Optics


  • Vol. 43, Iss. 20 — Jul. 9, 2004
  • pp: 3978–3982

High-accuracy measurement of the optical transmittance of optical bulk materials at deep-ultraviolet wavelengths

Ulrich Neukirch and Xinghua Li  »View Author Affiliations

Applied Optics, Vol. 43, Issue 20, pp. 3978-3982 (2004)

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A measurement setup that is capable of measuring the internal transmittance of fused-silica prisms at 193 nm with a precision better than 0.01%/cm (3σ) is presented. Its application to materials and wavelengths other than those that were chosen here for demonstration is straightforward. A lack of any standards makes it impossible to determine the absolute accuracy (also called measurement uncertainty) experimentally; however, calculations indicate that it is almost within the same margin as the precision.

© 2004 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.7000) Instrumentation, measurement, and metrology : Transmission
(260.7190) Physical optics : Ultraviolet

Original Manuscript: November 20, 2003
Revised Manuscript: April 5, 2004
Published: July 10, 2004

Ulrich Neukirch and Xinghua Li, "High-accuracy measurement of the optical transmittance of optical bulk materials at deep-ultraviolet wavelengths," Appl. Opt. 43, 3978-3982 (2004)

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