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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 21 — Jul. 20, 2004
  • pp: 4157–4163

Fast Scanning Method for One-Dimensional Surface Profile Measurement by Detecting Angular Deflection of a Laser Beam

Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations


Applied Optics, Vol. 43, Issue 21, pp. 4157-4163 (2004)
http://dx.doi.org/10.1364/AO.43.004157


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Abstract

A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.

© 2004 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5800) Instrumentation, measurement, and metrology : Scanners
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Citation
Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki, "Fast Scanning Method for One-Dimensional Surface Profile Measurement by Detecting Angular Deflection of a Laser Beam," Appl. Opt. 43, 4157-4163 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-21-4157


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References

  1. F. M. Smolka and T. P. Caudell, “Surface profile measurement and angular deflection monitoring using a scanning laser beam: a noncontact method,” Appl. Opt. 17, 3284–3289 (1978).
  2. P. Z. Takacs, S. K. Feng, E. L. Church, S. Qian, and W. Liu, “Long trace profile measurements on cylindrical aspheres,” in Advances in Fabrication and Metrology for Optics and Large Optics, J. B. Arnold and R. E. Parks, eds., Proc. SPIE 966, 354–364 (1988).
  3. I. Weingärtner, M. Schulz, and C. Elster, “Novel scanning technique for ultraprecise measurement of topography,” in Optical Manufacturing and Testing III, H. P. Stahl, ed., Proc. SPIE 3782, 306–317 (1999).
  4. J. D. Evans, “Method for approximating the radius of curvature of small concave spherical mirrors using a He-Ne laser,” Appl. Opt. 10, 995–996 (1971).
  5. M. V. Klein, Optics (Wiley, New York, 1970).

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