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Applied Optics

Applied Optics


  • Vol. 43, Iss. 21 — Jul. 20, 2004
  • pp: 4157–4163

Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations

Applied Optics, Vol. 43, Issue 21, pp. 4157-4163 (2004)

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A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.

© 2004 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5800) Instrumentation, measurement, and metrology : Scanners
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: January 3, 2004
Revised Manuscript: April 22, 2004
Published: July 20, 2004

Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki, "Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam," Appl. Opt. 43, 4157-4163 (2004)

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