It is well known that phase-shifting interferometry suffers from inaccuracy in the presence of phase-shifting errors. We have proved the limitation of using a 4-phase algorithm to reduce the phase-measurement error in the presence of the phase-shifting error. A class of 4 + 1-phase error compensating algorithms is formulated. It is shown that the proposed algorithms can effectively minimize the effects of the constant phase-shifting error and possess a superior performance than existing error-compensating algorithms. The effectiveness of the proposed algorithm is demonstrated by computer simulations and experiments.
© 2004 Optical Society of America
(100.5070) Image processing : Phase retrieval
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
Hongbo Bi, Ying Zhang, Keck Voon Ling, and Changyun Wen, "Class of 4 + 1-Phase Algorithms with Error Compensation," Appl. Opt. 43, 4199-4207 (2004)