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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 22 — Aug. 1, 2004
  • pp: 4362–4366

Interferometric ellipsometer with wavelength-modulated laser diode source

Lionel R. Watkins and Maarten D. Hoogerland  »View Author Affiliations


Applied Optics, Vol. 43, Issue 22, pp. 4362-4366 (2004)
http://dx.doi.org/10.1364/AO.43.004362


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Abstract

An interferometric ellipsometer, with no moving parts and an inexpensive laser diode source, is demonstrated. Temporal fringes are produced by a small modulation of the laser diode bias current and unbalanced arms in the interferometer. Fringe analysis algorithms are developed, and accurate measurements of the optical properties of a number of samples are made. Temperature tuning the laser diode center wavelength allows the frequency dependence of the optical properties to be determined over a wavelength range of approximately 1 nm.

© 2004 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry

History
Original Manuscript: January 11, 2004
Revised Manuscript: May 5, 2004
Published: August 1, 2004

Citation
Lionel R. Watkins and Maarten D. Hoogerland, "Interferometric ellipsometer with wavelength-modulated laser diode source," Appl. Opt. 43, 4362-4366 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-22-4362

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