We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed.
© 2004 Optical Society of America
Original Manuscript: September 13, 2003
Revised Manuscript: April 21, 2004
Published: August 10, 2004
Malalahalli S. Giridhar, Kibyung Seong, Axel Schülzgen, Pramod Khulbe, Nasser Peyghambarian, and Masud Mansuripur, "Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices," Appl. Opt. 43, 4584-4589 (2004)