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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 27 — Sep. 20, 2004
  • pp: 5137–5142

Optimization of diffraction grating profiles in fabrication by electron-beam lithography

Masato Okano, Hisao Kikuta, Yoshihiko Hirai, Kazuya Yamamoto, and Tsutom Yotsuya  »View Author Affiliations


Applied Optics, Vol. 43, Issue 27, pp. 5137-5142 (2004)
http://dx.doi.org/10.1364/AO.43.005137


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Abstract

We propose a new design method for periodic diffraction gratings to be fabricated with direct-writing electron-beam lithography. When the grating has a small period, the proximity effect of electron scattering restricts the grating profile after developing. Our design method optimizes the electron-dose profile and grating profile simultaneously to obtain the desired diffraction efficiency under the restriction of the proximity effect. The optimization is made with rigorous electromagnetic grating analysis and the resist development simulator. When we designed the diffraction grating with a period of 1.0 µm to obtain the highest efficiency of the first-order diffracted light of a 633-nm wavelength, the calculated grating profile was really different from the profile optimized only with rigorous electromagnetic grating analysis. Moreover, the diffraction grating of the electron-beam resist was fabricated according to the simulation result. The estimated diffraction efficiency was 82%, and the measured efficiency was 70%.

© 2004 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings

History
Original Manuscript: March 4, 2004
Revised Manuscript: April 28, 2004
Manuscript Accepted: April 28, 2004
Published: September 20, 2004

Citation
Masato Okano, Hisao Kikuta, Yoshihiko Hirai, Kazuya Yamamoto, and Tsutom Yotsuya, "Optimization of diffraction grating profiles in fabrication by electron-beam lithography," Appl. Opt. 43, 5137-5142 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-27-5137


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