An optimization algorithm that combines a rigorous electromagnetic computation model with an effective iterative method is utilized to design diffractive micro-optical elements that exhibit fast convergence and better design quality. The design example is a two-dimensional 1-to-2 beam splitter that can symmetrically generate two focal lines separated by 80 μm at the observation plane with a small angle separation of ±16°. Experimental results are presented for an element with continuous profiles fabricated into a monocrystalline silicon substrate that has a width of 160 μm and a focal length of 140 μm at a free-space wavelength of 10.6 μm.
© 2004 Optical Society of America
Original Manuscript: April 12, 2004
Revised Manuscript: July 20, 2004
Published: October 10, 2004
Di Feng, Yingbai Yan, Guofan Jin, and Shoushan Fan, "Design and fabrication of continuous-profile diffractive micro-optical elements as a beam splitter," Appl. Opt. 43, 5476-5480 (2004)