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Applied Optics

Applied Optics


  • Vol. 43, Iss. 29 — Oct. 10, 2004
  • pp: 5476–5480

Design and fabrication of continuous-profile diffractive micro-optical elements as a beam splitter

Di Feng, Yingbai Yan, Guofan Jin, and Shoushan Fan  »View Author Affiliations

Applied Optics, Vol. 43, Issue 29, pp. 5476-5480 (2004)

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An optimization algorithm that combines a rigorous electromagnetic computation model with an effective iterative method is utilized to design diffractive micro-optical elements that exhibit fast convergence and better design quality. The design example is a two-dimensional 1-to-2 beam splitter that can symmetrically generate two focal lines separated by 80 μm at the observation plane with a small angle separation of ±16°. Experimental results are presented for an element with continuous profiles fabricated into a monocrystalline silicon substrate that has a width of 160 μm and a focal length of 140 μm at a free-space wavelength of 10.6 μm.

© 2004 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

Original Manuscript: April 12, 2004
Revised Manuscript: July 20, 2004
Published: October 10, 2004

Di Feng, Yingbai Yan, Guofan Jin, and Shoushan Fan, "Design and fabrication of continuous-profile diffractive micro-optical elements as a beam splitter," Appl. Opt. 43, 5476-5480 (2004)

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