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Applied Optics

Applied Optics


  • Vol. 43, Iss. 3 — Jan. 20, 2004
  • pp: 575–578

Localized self-volume growth in hybrid sol-gel glass induced by ultraviolet radiation with a gray-scale mask

Weixing Yu and Xiaocong Yuan  »View Author Affiliations

Applied Optics, Vol. 43, Issue 3, pp. 575-578 (2004)

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UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.

© 2004 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel
(220.4000) Optical design and fabrication : Microstructure fabrication

Original Manuscript: June 12, 2003
Revised Manuscript: September 30, 2003
Published: January 20, 2004

Weixing Yu and Xiaocong Yuan, "Localized self-volume growth in hybrid sol-gel glass induced by ultraviolet radiation with a gray-scale mask," Appl. Opt. 43, 575-578 (2004)

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