UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.
© 2004 Optical Society of America
(050.1970) Diffraction and gratings : Diffractive optics
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel
(220.4000) Optical design and fabrication : Microstructure fabrication
Weixing Yu and Xiaocong Yuan, "Localized Self-Volume Growth in Hybrid Sol-Gel Glass Induced by Ultraviolet Radiation with a Gray-Scale Mask," Appl. Opt. 43, 575-578 (2004)