OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 3 — Jan. 20, 2004
  • pp: 585–591

Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer  »View Author Affiliations


Applied Optics, Vol. 43, Issue 3, pp. 585-591 (2004)
http://dx.doi.org/10.1364/AO.43.000585


View Full Text Article

Acrobat PDF (169 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The polarization and intensity of light scattered by polystyrene latex and copper spheres with diameters of approximately 100 nm deposited onto silicon substrates containing various thicknesses of oxide films were measured with 532-nm light. The results are compared with a theory for scattering by a sphere on a surface, originally developed by others [Physica A <b>137,</b> 209 (1986)] and extended to include coatings on the substrate. Nonlinear least-squares fits of the theory to the observations yield results that were consistent with differential mobility measurements of the particle diameter.

© 2004 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.0240) Optics at surfaces : Optics at surfaces
(290.0290) Scattering : Scattering
(350.4990) Other areas of optics : Particles

Citation
Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer, "Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces," Appl. Opt. 43, 585-591 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-3-585


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. J. C. Stover, Optical Scattering: Measurement and Analysis, Vol. PM24 of the SPIE Press Monographs (SPIE, Bellingham, Wash., 1995).
  2. P. A. Bobbert and J. Vlieger, “Light scattering by a sphere on a substrate,” Physica A 137, 209–242 (1986).
  3. K. B. Nahm and W. L. Wolfe, “Light-scattering models for spheres on a conducting plane: comparison with experiment,” Appl. Opt. 26, 2995–2999 (1987).
  4. G. Videen, “Light scattering from a sphere on or near a surface,” J. Opt. Soc. Am. A 8, 483–489 (1991).
  5. G. Videen, “Light scattering from a sphere on or near a surface: errata,” J. Opt. Soc. Am. A 9, 844–845 (1992).
  6. G. Videen, M. G. Turner, V. J. Iafelice, W. S. Bickel, and W. L. Wolfe, “Scattering from a small sphere near a surface,” J. Opt. Soc. Am. A 10, 118–126 (1993).
  7. Yu. Eremin and N. Orlov, “Simulation of light scattering from a particle upon a wafer surface,” Appl. Opt. 35, 6599–6604 (1996).
  8. E. Fucile, P. Denti, F. Borghese, R. Saija, and O. I. Sindoni, “Optical properties of a sphere in the vicinity of a plane surface,” J. Opt. Soc. Am. A 14, 1505–1514 (1997).
  9. R. Schmehl, B. M. Nebeker, and E. D. Hirleman, “Discrete-dipole approximation for scattering by features on surfaces by means of a two-dimensional fast Fourier transform technique,” J. Opt. Soc. Am. A 14, 3026–3036 (1997).
  10. Yu. Eremin and N. Orlov, “Modeling of light scattering by non-spherical particles based on discrete sources method,” J. Quant. Spectrosc. Radiat. Transfer 60, 451–462 (1998).
  11. Y. A. Eremin, J. C. Stover, and N. V. Orlov, “Modeling scatter from silicon wafer features based on discrete sources method,” Opt. Eng. 38, 1296–1304 (1999).
  12. A. Doicu, Yu. Eremin, and T. Wriedt, “Non-axisymmetric models for light scattering from a particle on or near a plane surface,” Opt. Commun. 182, 281–288 (2000).
  13. D. C. Weber and E. D. Hirleman, “Light scattering signatures of individual spheres on optically smooth conducting surfaces,” Appl. Opt. 27, 4019–4026 (1988).
  14. L. Sung, G. W. Mulholland, and T. A. Germer, “Polarized light-scattering measurements of dielectric spheres upon a silicon surface,” Opt. Lett. 24, 866–868 (1999).
  15. B. Kaplan and B. Drevillon, “Mueller matrix of dense polystyrene latex sphere suspensions: measurements and Monte Carlo simulation,” Appl. Opt. 40, 2769–2777 (2001).
  16. B. Kaplan and B. Drevillon, “Mueller matrix measurements of small spherical particles deposited on a c-Si wafer,” Appl. Opt. 41, 3911–3918 (2002).
  17. J. H. Kim, S. H. Ehrman, G. W. Mulholland, and T. A. Germer, “Polarized light scattering by dielectric and metallic spheres on silicon wafers,” Appl. Opt. 41, 5405–5412 (2002).
  18. J. C. Stover and C. A. Scheer, “Accurate sizing of deposited PSL spheres from light scatter measurements,” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds., Proc. SPIE 4449, 147–150 (2001).
  19. T. A. Germer, G. W. Mulholland, J. H. Kim, and S. H. Ehrman, “Measurement of the 100 nm NIST SRM® 1963 by laser surface light scattering,” in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 60–71 (2002).
  20. T. A. Germer, “SCATMECH: polarized light scattering C++ class library,” available at http://physics.nist.gov/scatmech (2000).
  21. W. Kern and D. A. Puotinen, “Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology,” RCA Rev. 30, 187–206 (1984).
  22. C. R. Helms and C.-J. Han, “Parallel oxidation mechanism for Si oxidation in dry O2,” J. Electrochem. Soc. 134, 1297–1302 (1987).
  23. Y. Wang, J. Tao, S. Tong, T. Sun, A. Zhang, and S. Feng, “The oxidation kinetics of thin polycrystalline silicon films,” J. Electrochem. Soc. 138, 214–219 (1991).
  24. Unless otherwise noted, we obtained the uncertainties quoted in this paper by estimating the standard uncertainty u for the measurement and multiplying by a coverage factor of k = 2. These values correspond to a confidence level of 95%.
  25. G. W. Mulholland, N. P. Bryner, and C. Croarkin, “Measurement of the 100 nm NIST SRM 1963 by differential mobility analysis,” Aerosol Sci. Technol. 31, 39–55 (1999).
  26. J. H. Kim, T. A. Germer, G. W. Mulholland, and S. H. Ehrman, “Size-monodisperse metal nanoparticles via hydrogen-free spray pyrolysis,” Adv. Mater. 14, 518–521 (2002).
  27. P. D. Kinney, D. Y. H. Pui, G. W. Mulholland, and N. P. Bryner, “Use of the electrostatic classification method to size 0.1 μm SRM particles—a feasibility study,” J. Res. Natl. Inst. Stand. Technol. 96, 147–176 (1991).
  28. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).
  29. R. H. Boundy and R. F. Boyer, eds., Styrene, Its Polymers, Copolymers, and Derivatives (Reinhold, New York, 1952).
  30. T. A. Germer and C. C. Asmail, “Goniometric optical scatter instrument for out-of-plane ellipsometry measurements,” Rev. Sci. Instr. 70, 3688–3695 (1999).
  31. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C: The Art of Scientific Computing (Cambridge U. Press, Cambridge, UK, 1992).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited