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Applied Optics

Applied Optics


  • Vol. 43, Iss. 30 — Oct. 20, 2004
  • pp: 5607–5613

Development of a diffraction-type optical triangulation sensor

Chien-Hung Liu, Wen-Yuh Jywe, and Chao-Kwai Chen  »View Author Affiliations

Applied Optics, Vol. 43, Issue 30, pp. 5607-5613 (2004)

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We propose a diffraction-type optical triangulation sensor based on the diffraction theorem and the laser triangulation method. The advantage of the proposed sensor is that it obtains not only the linear displacement of a moving object but also its three angular motion errors. The developed sensor is composed mainly of a laser source, two quadrant detectors, and a reflective diffraction grating. The reflective diffraction grating can reflect the incident laser beam into several diffractive rays, and two quadrant detectors were set up for detecting the position of 0- and +1-order diffraction rays. According to the optical triangulation relationship between the spatial incident angles of a laser beam and the output coordinates of two quadrant detectors, the displacement and the three angular motion errors of a moving object can be obtained simultaneously.

© 2004 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

Original Manuscript: March 25, 2004
Revised Manuscript: July 9, 2004
Published: October 20, 2004

Chien-Hung Liu, Wen-Yuh Jywe, and Chao-Kwai Chen, "Development of a diffraction-type optical triangulation sensor," Appl. Opt. 43, 5607-5613 (2004)

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