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Applied Optics

Applied Optics


  • Vol. 43, Iss. 31 — Nov. 1, 2004
  • pp: 5738–5743

Highest-accuracy interferometer alignment by retroreflection scanning

René Schödel and Gerhard Bönsch  »View Author Affiliations

Applied Optics, Vol. 43, Issue 31, pp. 5738-5743 (2004)

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One important prerequisite for interferometric length measurements of high accuracy is autocollimation adjustment. This guarantees that the direction of the length scale represented by light waves is parallel to the length direction of the object investigated. First we describe the conventional visual autocollimation adjustment method used at Physikalisch-Technische Bundesanstalt since the beginning of interferometric length measurements. Then a new autocollimation method based on scanning the retroreflection from the interferometer is described. Check measurements are performed in order to investigate the quality of the adjustment. As a result of the method applied the uncertainty contribution originating from the cosine error could be reduced drastically for the interferometer used.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Original Manuscript: March 11, 2004
Revised Manuscript: July 9, 2004
Manuscript Accepted: July 12, 2004
Published: November 1, 2004

René Schödel and Gerhard Bönsch, "Highest-accuracy interferometer alignment by retroreflection scanning," Appl. Opt. 43, 5738-5743 (2004)

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  1. J. E. Decker, R. Schödel, G. Bönsch, “Considerations for evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry,” Metrologia 41, L11–L17 (2004). [CrossRef]
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  7. R. Schödel, A. Nicolaus, G. Bönsch, “Minimizing interferometer misalignment errors for measurement of subnanometer length changes,” in Recent Developments in Traceable Dimensional Measurements II, J. E. Decker, N. Brown, eds., Proc. SPIE5190, 34–42 (2003). [CrossRef]
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