OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 31 — Nov. 1, 2004
  • pp: 5738–5743

Highest-accuracy interferometer alignment by retroreflection scanning

René Schödel and Gerhard Bönsch  »View Author Affiliations


Applied Optics, Vol. 43, Issue 31, pp. 5738-5743 (2004)
http://dx.doi.org/10.1364/AO.43.005738


View Full Text Article

Enhanced HTML    Acrobat PDF (724 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

One important prerequisite for interferometric length measurements of high accuracy is autocollimation adjustment. This guarantees that the direction of the length scale represented by light waves is parallel to the length direction of the object investigated. First we describe the conventional visual autocollimation adjustment method used at Physikalisch-Technische Bundesanstalt since the beginning of interferometric length measurements. Then a new autocollimation method based on scanning the retroreflection from the interferometer is described. Check measurements are performed in order to investigate the quality of the adjustment. As a result of the method applied the uncertainty contribution originating from the cosine error could be reduced drastically for the interferometer used.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: March 11, 2004
Revised Manuscript: July 9, 2004
Manuscript Accepted: July 12, 2004
Published: November 1, 2004

Citation
René Schödel and Gerhard Bönsch, "Highest-accuracy interferometer alignment by retroreflection scanning," Appl. Opt. 43, 5738-5743 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-31-5738


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. E. Decker, R. Schödel, G. Bönsch, “Considerations for evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry,” Metrologia 41, L11–L17 (2004). [CrossRef]
  2. R. Schödel, J. E. Decker, “Methods to recognize the sample position for most precise interferometric length measurements,” in Interferometry XII: Techniques and Analysis, W. Osten, E. Novak, eds., Proc. SPIE5532, 237–247 (2004).
  3. P. Cordiale, G. Galzerano, H. Schnatz, “International comparison of two iodine-stabilized frequency-doubled Nd:YAG lasers at 532 nm,” Metrologia 37, 177–182 (2000). [CrossRef]
  4. G. Bönsch, E. Potulski, “Measurement of the refractive index of air and comparison with modified Edlen’s formulas,” Metrologia 35, 133–139 (1998). [CrossRef]
  5. K. Creath, “Temporal phase measuring methods,” in Interferogram Analysis: Digital Fringe Pattern Measurement Techniques, D. W. Robinson, G. T. Reid, eds. (Institute of Bristol, U.K., 1993), pp. 99–112.
  6. C. F. Bruce, “The effect of collimation and oblique incidence in length interferometers,” Aust. J. Phys. 8, 224–240 (1955). [CrossRef]
  7. R. Schödel, A. Nicolaus, G. Bönsch, “Minimizing interferometer misalignment errors for measurement of subnanometer length changes,” in Recent Developments in Traceable Dimensional Measurements II, J. E. Decker, N. Brown, eds., Proc. SPIE5190, 34–42 (2003). [CrossRef]
  8. G. Bönsch, “Simultaneous wavelength comparison of iodine stabilized lasers at 515 nm, 633 nm, and 640 nm,” IEEE Trans. Instrum. Meas. IM-34, 248–251 (1985). [CrossRef]
  9. A. Lewis, D. J. Pugh, “Interferometer light source and alignment aid using single-mode optical fibers,” Meas. Sci. Technol. 3, 929–930 (1992). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited