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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 31 — Nov. 1, 2004
  • pp: 5738–5743

Highest-Accuracy Interferometer Alignment by Retroreflection Scanning

René Schödel and Gerhard Bönsch  »View Author Affiliations


Applied Optics, Vol. 43, Issue 31, pp. 5738-5743 (2004)
http://dx.doi.org/10.1364/AO.43.005738


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Abstract

One important prerequisite for interferometric length measurements of high accuracy is autocollimation adjustment. This guarantees that the direction of the length scale represented by light waves is parallel to the length direction of the object investigated. First we describe the conventional visual autocollimation adjustment method used at Physikalisch-Technische Bundesanstalt since the beginning of interferometric length measurements. Then a new autocollimation method based on scanning the retroreflection from the interferometer is described. Check measurements are performed in order to investigate the quality of the adjustment. As a result of the method applied the uncertainty contribution originating from the cosine error could be reduced drastically for the interferometer used.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Citation
René Schödel and Gerhard Bönsch, "Highest-Accuracy Interferometer Alignment by Retroreflection Scanning," Appl. Opt. 43, 5738-5743 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-31-5738


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References

  1. J. E. Decker, R. Schödel, and G. Bönsch, “Considerations for evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry,” Metrologia 41, L11–L17 (2004).
  2. R. Schödel and J. E. Decker, “Methods to recognize the sample position for most precise interferometric length measurements,” in Interferometry XII: Techniques and Analysis, W. Osten and E. Novak, eds., Proc. SPIE 5532, 237–247 (2004).
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  8. G. Bönsch, “Simultaneous wavelength comparison of iodine stabilized lasers at 515 nm, 633 nm, and 640 nm,” IEEE Trans. Instrum. Meas. IM-34, 248–251 (1985).
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