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Applied Optics

Applied Optics


  • Vol. 43, Iss. 34 — Dec. 1, 2004
  • pp: 6265–6269

Interface quality and thermal stability of laser-deposited metal/MgO multilayers

Christian Fuhse, Hans-Ulrich Krebs, Satish Vitta, and Göran A. Johansson  »View Author Affiliations

Applied Optics, Vol. 43, Issue 34, pp. 6265-6269 (2004)

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Metal/MgO multilayers (metal of Fe, Ni80Nb20, and Ti) with bilayer periods in the range 1.2–3.0 nm have been prepared by pulsed laser deposition and characterized by both hard and soft-x-ray reflectometry. The interface roughness is found to be ≤0.5 nm in all the samples and is nearly independent of the total number of deposited bilayers. The interface roughness, however, depends on the absolute thickness of the individual layers and increases from ≈0.3 nm for a 3.0-nm period to ≈0.5 nm for a bilayer period of 1.2 nm. The multilayers are found to be highly stable up to temperatures as high as 550 °C. The hard-x-ray reflectivity of the multilayers decreases for T > 300 °C, whereas the layered structure is stable up to 550 °C. The reflectivity in the water window region of soft x rays, λ = 3.374 nm, was found to be 0.4% at an angle of incidence of ≈54° for multilayers with 60 bilayers at a period of ≈2.1 nm.

© 2004 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors

Original Manuscript: January 19, 2004
Published: December 1, 2004

Christian Fuhse, Hans-Ulrich Krebs, Satish Vitta, and Göran A. Johansson, "Interface quality and thermal stability of laser-deposited metal/MgO multilayers," Appl. Opt. 43, 6265-6269 (2004)

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