A detailed analysis of the polarization characteristics (birefringence) of a silicon-on-insulator (SOI) rib waveguide is given. The fundamental TE- and TM-polarized modes of the SOI rib waveguide are calculated by a semivectorial finite-difference method. The rib width and the slab height of the SOI rib waveguide are normalized with respect to the total height of the silicon layer. A general relation between the two normalized parameters for a nonbirefringent SOI rib waveguide is obtained. According to this relation a nonbirefringent SOI rib waveguide can easily be designed. The fabrication tolerance for a nonbirefringent SOI rib waveguide is also analyzed, revealing that the tolerance can be increased by use of a larger total height of the silicon layer.
© 2004 Optical Society of America
Original Manuscript: July 10, 2003
Revised Manuscript: September 24, 2003
Published: February 10, 2004
Daoxin Dai and Sailing He, "Analysis of the birefringence of a silicon-on-insulator rib waveguide," Appl. Opt. 43, 1156-1161 (2004)