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Applied Optics

Applied Optics


  • Vol. 43, Iss. 6 — Feb. 20, 2004
  • pp: 1327–1330

High-efficiency transmission gratings buried in a fused-SiO2 glass plate

Junji Nishii, Kenji Kintaka, and Tatsuhiro Nakazawa  »View Author Affiliations

Applied Optics, Vol. 43, Issue 6, pp. 1327-1330 (2004)

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Binary gratings were fabricated with high first-order diffraction efficiency by conventional electron-beam drawing and subsequent inductive coupled-plasma dry etching upon the surfaces of SiO2 glass plates. The gratings were covered with a thin SiO2 film by plasma-enhanced chemical-vapor deposition without the grooves’ being filled in. The buried gratings exhibited first-order diffraction efficiencies of 84% for transverse-electric and 87% for transverse-magnetic polarized light at a wavelength of 1.55 μm when the period and the depth were 1.5 and 2.8 μm, respectively.

© 2004 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.2750) Materials : Glass and other amorphous materials
(230.0230) Optical devices : Optical devices

Original Manuscript: July 22, 2003
Revised Manuscript: November 7, 2003
Published: February 20, 2004

Junji Nishii, Kenji Kintaka, and Tatsuhiro Nakazawa, "High-efficiency transmission gratings buried in a fused-SiO2 glass plate," Appl. Opt. 43, 1327-1330 (2004)

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