OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 6 — Feb. 20, 2004
  • pp: 1327–1330

High-Efficiency Transmission Gratings Buried in a Fused-SiO2 Glass Plate

Junji Nishii, Kenji Kintaka, and Tatsuhiro Nakazawa  »View Author Affiliations


Applied Optics, Vol. 43, Issue 6, pp. 1327-1330 (2004)
http://dx.doi.org/10.1364/AO.43.001327


View Full Text Article

Acrobat PDF (545 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Binary gratings were fabricated with high first-order diffraction efficiency by conventional electron-beam drawing and subsequent inductive coupled-plasma dry etching upon the surfaces of SiO2 glass plates. The gratings were covered with a thin SiO2 film by plasma-enhanced chemical-vapor deposition without the grooves’ being filled in. The buried gratings exhibited first-order diffraction efficiencies of 84% for transverse-electric and 87% for transverse-magnetic polarized light at a wavelength of 1.55 μm when the period and the depth were 1.5 and 2.8 μm, respectively.

© 2004 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.2750) Materials : Glass and other amorphous materials
(230.0230) Optical devices : Optical devices

Citation
Junji Nishii, Kenji Kintaka, and Tatsuhiro Nakazawa, "High-Efficiency Transmission Gratings Buried in a Fused-SiO2 Glass Plate," Appl. Opt. 43, 1327-1330 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-6-1327

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited