We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo<sub>2</sub>C, Si/B<sub>4</sub>C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths, as well as the greatest thermal stability. We also describe the optimization of multilayers designed for the Solar-B EIS instrument. Finally, we compare experimental reflectance data with calculations and conclude that currently available optical constants cannot be used to adequately model the performance of many of these multilayers.
© 2004 Optical Society of America
(230.4170) Optical devices : Multilayers
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties
(340.0340) X-ray optics : X-ray optics
(350.1260) Other areas of optics : Astronomical optics
David L. Windt, Soizik Donguy, John Seely, and Benjawan Kjornrattanawanich, "Experimental Comparison of Extreme-Ultraviolet Multilayers for Solar Physics," Appl. Opt. 43, 1835-1848 (2004)