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Applied Optics

Applied Optics


  • Vol. 43, Iss. 9 — Mar. 19, 2004
  • pp: 1971–1980

Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

Tao Tong, Jinggao Li, and Jon P. Longtin  »View Author Affiliations

Applied Optics, Vol. 43, Issue 9, pp. 1971-1980 (2004)

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Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(140.7090) Lasers and laser optics : Ultrafast lasers
(300.2140) Spectroscopy : Emission
(320.7150) Ultrafast optics : Ultrafast spectroscopy
(350.3390) Other areas of optics : Laser materials processing

Original Manuscript: June 25, 2003
Revised Manuscript: November 25, 2003
Published: March 20, 2004

Tao Tong, Jinggao Li, and Jon P. Longtin, "Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy," Appl. Opt. 43, 1971-1980 (2004)

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