OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 44, Iss. 11 — Apr. 10, 2005
  • pp: 2202–2212

Diffraction-induced coherence levels

Alexander Tavrov, Joanna Schmit, Norbert Kerwien, Wolfgang Osten, and Hans Tiziani  »View Author Affiliations

Applied Optics, Vol. 44, Issue 11, pp. 2202-2212 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (1736 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We examined the influence of complex diffraction effects on low-coherence fringes created for high-aspect depth-to-width ratio structures called trenches. The coherence function was analyzed for these micrometer-wide trenches and was registered with a white-light interference microscope. For some types of surface structure we observed that additional low-coherence fringes that do not correspond directly to the surface topology are formed near the sharp edges of the structures. These additional coherence fringes were studied by rigorous numerical evaluations of vector diffractions, and these simulated interference fields were then compared with experimental results that were obtained with a white-light interference microscope.

© 2005 Optical Society of America

OCIS Codes
(110.4980) Imaging systems : Partial coherence in imaging
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(180.3170) Microscopy : Interference microscopy

Original Manuscript: February 26, 2004
Revised Manuscript: July 1, 2004
Manuscript Accepted: November 16, 2004
Published: April 10, 2005

Alexander Tavrov, Joanna Schmit, Norbert Kerwien, Wolfgang Osten, and Hans Tiziani, "Diffraction-induced coherence levels," Appl. Opt. 44, 2202-2212 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. P. J. Caber, “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993). [CrossRef] [PubMed]
  2. M. Fleischer, R. Windecker, H. J. Tiziani, “Theoretical limits of scanning white-light interferometry signal evaluation algorithms,” Appl. Opt. 40, 2815–2820 (2001). [CrossRef]
  3. L. Deck, P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef] [PubMed]
  4. A. Tavrov, M. Totzeck, N. Kerwien, H. J. Tiziani, “Rigorous coupled-wave analysis calculus of sub micrometer interference pattern and resolving edge position versus signal-to-noise ratio,” Opt. Eng. 41, 1886–1892 (2002). [CrossRef]
  5. M. G. Moharan, E. B. Grann, D. A. Pommet, T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068–1076 (1995). [CrossRef]
  6. H. H. Hopkins, “Image formation with partially coherent light,” Photograph. Sci. Eng. 21, 114–123 (1977).
  7. M. G. Moharan, E. B. Grann, D. A. Pommet, T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12, 1077–1086 (1995). [CrossRef]
  8. M. Totzeck, H. Jacobsen, H. J. Tiziani, “Edge localization of subwavelength structures by use of polarization interferometry and extreme-value criteria,” Appl. Opt. 39, 6295–6305 (2000). [CrossRef]
  9. M. Totzeck, “Numerical simulation of high-NA quantitative polarization microscopy and corresponding near-fields,” Optik (Stuttgart) 112, 399–406 (2001). [CrossRef]
  10. K. Leonhardt, H. J. Tiziani, “Optical topometry of surfaces with locally changing materials, layers and contaminations. 1. Topographic methods, based on two-beam interferometry,” J. Mod. Opt. 46, 101–114 (1999). [CrossRef]
  11. K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1988), Vol. XXVI, pp. 349–393. [CrossRef]
  12. J. Schmit, K. Creath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996). [CrossRef] [PubMed]
  13. P. Ettl, “Über die Signalentstehung bei Weiβlichtinterferametrie,” Ph.D. thesis (University of Erlangen-Nürnberg, 2001), pp. 46–50.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited