OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 11 — Apr. 10, 2005
  • pp: 2202–2212

Diffraction-induced coherence levels

Alexander Tavrov, Joanna Schmit, Norbert Kerwien, Wolfgang Osten, and Hans Tiziani  »View Author Affiliations


Applied Optics, Vol. 44, Issue 11, pp. 2202-2212 (2005)
http://dx.doi.org/10.1364/AO.44.002202


View Full Text Article

Enhanced HTML    Acrobat PDF (1736 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We examined the influence of complex diffraction effects on low-coherence fringes created for high-aspect depth-to-width ratio structures called trenches. The coherence function was analyzed for these micrometer-wide trenches and was registered with a white-light interference microscope. For some types of surface structure we observed that additional low-coherence fringes that do not correspond directly to the surface topology are formed near the sharp edges of the structures. These additional coherence fringes were studied by rigorous numerical evaluations of vector diffractions, and these simulated interference fields were then compared with experimental results that were obtained with a white-light interference microscope.

© 2005 Optical Society of America

OCIS Codes
(110.4980) Imaging systems : Partial coherence in imaging
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(180.3170) Microscopy : Interference microscopy

History
Original Manuscript: February 26, 2004
Revised Manuscript: July 1, 2004
Manuscript Accepted: November 16, 2004
Published: April 10, 2005

Citation
Alexander Tavrov, Joanna Schmit, Norbert Kerwien, Wolfgang Osten, and Hans Tiziani, "Diffraction-induced coherence levels," Appl. Opt. 44, 2202-2212 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-11-2202

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited