Miniature fiber-optic pressure sensor with a polymer diaphragm
Applied Optics, Vol. 44, Issue 14, pp. 2736-2744 (2005)
http://dx.doi.org/10.1364/AO.44.002736
Acrobat PDF (512 KB)
Abstract
The fabrication and experimental investigation of a miniature optical fiber pressure sensor for biomedical and industrial applications are described. The sensor measures only 125 µm in diameter. The essential element is a thin polymer diaphragm that is positioned inside the hollow end of an optical fiber. The cavity at the fiber end is made by a simple and effective micromachining process based on wet etching in diluted HF acid. Thus a Fabry-Perot interferometer is formed between the inner fiber-cavity interface and the diaphragm. The fabrication technique is described in detail. Different sensor prototypes were fabricated upon 125 µm-diameter optical fiber that demonstrated pressure ranges from 0 to 40 and from 0 to 1200 kPa. A resolution of less than 10 Pa was demonstrated in practice. The fabrication technique presented facilitates production of simple and low-cost disposable pressure sensors by use of materials with that ensure the required biocompatibility.
© 2005 Optical Society of America
OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3890) Instrumentation, measurement, and metrology : Medical optics instrumentation
Citation
Edvard Cibula and Denis Ðonlagic, "Miniature fiber-optic pressure sensor with a polymer diaphragm," Appl. Opt. 44, 2736-2744 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-14-2736
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Digital and Analog Readout Systems for Fiber-Optic Strain Sensors as Applied to the Monitoring of Roller Element Bearing Systems (AO)
- Signal-processing algorithm for white-light optical fiber extrinsic Fabry-Perot interferometric sensors (OL)
- Exact Analysis of Low-Finesse Multimode Fiber Extrinsic Fabry-Perot Interferometers (AO)
- Optical acoustic detector based on a fiber Fabry-Perot interferometer (AO)
- All-fiber high-sensitivity pressure sensor with SiO2 diaphragm (OL)
« Previous Article | Next Article »
OSA is a member of 