We present a study in which we enhance the carrier-to-noise ratio of a superresolution near-field structure (super-RENS) disk to read below 100-nm marks by implementing a mask layer comprising a Au nanocluster-embedded dielectric film. Various Au nanocluster-embedded mask layers are fabricated by a radio-frequency cosputtering process, and the size and distribution of Au nanoclusters are controlled. To verify the enhancement of the various films for super-RENS disk applications, the sensitivity enhancement of plasmonic gas sensing is demonstrated.
© 2005 Optical Society of America
Jenq-Nan Yih, Wei-Chih Hsu, Song-Yeu Tsai, and Shean-Jen Chen, "Enhanced readout signal of superresolution near-field structure disks by control of the size and distribution of metal nanoclusters," Appl. Opt. 44, 3001-3005 (2005)