OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 15 — May. 20, 2005
  • pp: 3006–3012

Refractive index of thin films of SiO2, ZrO2, and HfO2 as a function of the films’ mass density

Martin Jerman, Zhaohui Qiao, and Dieter Mergel  »View Author Affiliations


Applied Optics, Vol. 44, Issue 15, pp. 3006-3012 (2005)
http://dx.doi.org/10.1364/AO.44.003006


View Full Text Article

Enhanced HTML    Acrobat PDF (146 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Series of amorphous SiO2, ZrO2 and HfO2 films were prepared by electron-beam evaporation at various oxygen pressures such that the packing density varied from 0.6 to 0.82. Transmittance spectra were evaluated with respect to thickness and refractive index by application of analytical formulas to the interference extrema and by dielectric modeling. The thickness of the films ranged from 150 to 1500 nm. The coefficients of Cauchy and Sellmeier dispersion curves were determined as a function of the packing density. The mass density of the compact amorphous grains was estimated by an effective-medium theory and a general refractivity formula. It is similar to those of the crystalline materials. We used the optical data to design multilayer coatings for laser applications in a broad spectral range, including the UV.

© 2005 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

History
Original Manuscript: February 2, 2004
Revised Manuscript: December 7, 2004
Manuscript Accepted: December 15, 2004
Published: May 20, 2005

Citation
Martin Jerman, Zhaohui Qiao, and Dieter Mergel, "Refractive index of thin films of SiO2, ZrO2, and HfO2 as a function of the films’ mass density," Appl. Opt. 44, 3006-3012 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-15-3006

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited