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Applied Optics

Applied Optics


  • Vol. 44, Iss. 16 — Jun. 1, 2005
  • pp: 3238–3245

Tunable microfluidic microlenses

Armin Werber and Hans Zappe  »View Author Affiliations

Applied Optics, Vol. 44, Issue 16, pp. 3238-3245 (2005)

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A novel type of liquid microlens, bounded by a microfabricated, distensible membrane and activated by a microfluidic liquid-handling system, is presented. By use of an elastomer membrane fabricated by spin coating onto a dry-etched silicon substrate, the liquid-filled cavity acts as a lens whereby applied pressure changes the membrane distension and thus the focal length. Both plano–convex and plano–concave lenses, individual elements as well as arrays, were fabricated and tested. The lens surface roughness was seen to be ∼9 nm rms, and the focal length could be tuned from 1 to 18 mm. This lens represents a robust, self-contained tunable optical structure suitable for use in, for example, a medical environment.

© 2005 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.3620) Optical design and fabrication : Lens system design
(220.3630) Optical design and fabrication : Lenses
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: October 15, 2004
Revised Manuscript: December 20, 2004
Manuscript Accepted: December 20, 2004
Published: June 1, 2005

Armin Werber and Hans Zappe, "Tunable microfluidic microlenses," Appl. Opt. 44, 3238-3245 (2005)

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  1. D. Daly, Microlens Arrays (Taylor & Francis, New York, 2001).
  2. J. C. Roulet, R. Völkel, H. P. Herzig, E. Verpoorte, N. F. de Rooij, R. Dändliker, “Microlens systems for fluorescence detection in chemical microsystems,” Opt. Eng. 40, 814–821 (2001). [CrossRef]
  3. H.-P. Herzig, Micro-optics (Taylor & Francis, New York, 1997).
  4. B. Berge, J. Perseux, “Variable focal lens controlled by an external voltage: an application of electrowetting,” Eur. Phys. 3, 159–163 (2000).
  5. T. Krupenkin, S. Yang, P. Mach, “Tunable liquid microlens,” Appl. Phys. Lett. 82, 316–318 (2003). [CrossRef]
  6. H. Ren, Y.-H. Fan, S.-T. Wu, “Liquid-crystal microlens arrays using patterned polymer networks,” Opt. Lett. 29, 1608–1610 (2004). [CrossRef] [PubMed]
  7. J. Chen, W. Wang, J. Fang, K. Varahramyan, “Variable-focusing microlens with microfluidic chip,” Micromech. Microeng. 14, 675–680 (2004). [CrossRef]
  8. N. Chronis, G. L. Liu, K.-H. Jeong, L. P. Lee, “Tunable liquid-filled microlens array integrated with microfluidic network,” Opt. Express 19, 2370–2378 (2003), http://www.opticsexpress.org . [CrossRef]
  9. A. Casner, J.-P. Delville, “Adaptive lensing driven by the radiation pressure of a continuous-wave laser wave upon a near-critical liquid-liquid interface,” Opt. Lett. 26, 1418–1420 (2001). [CrossRef]
  10. M. Madou, Fundamentals of Microfabrication (CRC Press, Boca Raton, Fla., 2002.

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