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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 16 — Jun. 1, 2005
  • pp: 3238–3245

Tunable microfluidic microlenses

Armin Werber and Hans Zappe  »View Author Affiliations


Applied Optics, Vol. 44, Issue 16, pp. 3238-3245 (2005)
http://dx.doi.org/10.1364/AO.44.003238


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Abstract

A novel type of liquid microlens, bounded by a microfabricated, distensible membrane and activated by a microfluidic liquid-handling system, is presented. By use of an elastomer membrane fabricated by spin coating onto a dry-etched silicon substrate, the liquid-filled cavity acts as a lens whereby applied pressure changes the membrane distension and thus the focal length. Both plano-convex and plano-concave lenses, individual elements as well as arrays, were fabricated and tested. The lens surface roughness was seen to be ∼9 nm rms, and the focal length could be tuned from 1 to 18 mm. This lens represents a robust, self-contained tunable optical structure suitable for use in, for example, a medical environment.

© 2005 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.3620) Optical design and fabrication : Lens system design
(220.3630) Optical design and fabrication : Lenses
(350.3950) Other areas of optics : Micro-optics

Citation
Armin Werber and Hans Zappe, "Tunable microfluidic microlenses," Appl. Opt. 44, 3238-3245 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-16-3238


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References

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