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Applied Optics

Applied Optics


  • Vol. 44, Iss. 16 — Jun. 1, 2005
  • pp: 3284–3290

Profiling of objects with height steps by wavelet analysis of shadow moiré fringes

Chenggen Quan, Yu Fu, Cho Jui Tay, and Jia Min Tan  »View Author Affiliations

Applied Optics, Vol. 44, Issue 16, pp. 3284-3290 (2005)

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A temporal wavelet analysis algorithm is proposed for shadow-moiré-based three-dimensional surface profiling on objects having discontinuous height steps. A grating is positioned close to an object, and its shadow is observed through the grating. The moiré fringe patterns vary when the grating is in-plane rotating. A series of fringe patterns are captured by a CCD camera at different rotating angles. Phase values are evaluated point by point with the continuous wavelet transform. From the phase values of each point on the object, the distance between the object and the grating can be retrieved. The surface profile is obtained without temporal or spatial phase unwrapping. This technique is applicable to objects with discontinuous height steps, which are impossible to measure with conventional shadow moiré topography. Two specimens are tested to demonstrate the validity of the method: One is an object with a height step of 1.6 mm, and another is a small coin with unevenness of less than 0.2 mm. The experimental results are compared with test results by use of the mechanical stylus method.

© 2005 Optical Society of America

OCIS Codes
(100.5070) Image processing : Phase retrieval
(100.7410) Image processing : Wavelets
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: June 15, 2004
Revised Manuscript: December 14, 2004
Manuscript Accepted: January 5, 2005
Published: June 1, 2005

Chenggen Quan, Yu Fu, Cho Jui Tay, and Jia Min Tan, "Profiling of objects with height steps by wavelet analysis of shadow moiré fringes," Appl. Opt. 44, 3284-3290 (2005)

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