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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 17 — Jun. 10, 2005
  • pp: 3492–3498

Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system

Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qianxiang Huang, and Tomizo Kurosawa  »View Author Affiliations


Applied Optics, Vol. 44, Issue 17, pp. 3492-3498 (2005)
http://dx.doi.org/10.1364/AO.44.003492


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Abstract

The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 (2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 µm.

© 2005 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

Citation
Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qianxiang Huang, and Tomizo Kurosawa, "Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system," Appl. Opt. 44, 3492-3498 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-17-3492


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References

  1. C. Wu and C. Su, "Nonlinearity in measurement of length by optical interferometry," Meas. Sci. Technol. 7, 62-68 (1996).
  2. T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa, "Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems," Appl. Opt. 43, 2443-2448 (2004).
  3. W. Augustyn, "An analysis polarization mixing errors in distance measuring interferometer," J. Vac. Sci. Technol. B 8, 2032-2036 (1990).
  4. S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, and H. Yukawa, "Real-time, interferometrically measuring atomic force microscope for direct calibration of standards," Rev. Sci. Instrum. 70, 3362-3368 (1999).
  5. I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, "Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope," Meas. Sci. Technol. 14, 463-471 (2003).
  6. V. Greco, G. Molesini, and F. Quercioli, "Accurate polarization interferometer," Rev. Sci. Instrum. 66, 3729-3734 (1995).
  7. P. L. M. Heydemann, "Determination and correction of quadrature fringe measurement errors in interferometers," Appl. Opt. 20, 3382-3384 (1981).
  8. K. P. Birch, "Optical fringe subdivision with nanometric accuracy," Precis. Eng. 12, 195-198 (1990).
  9. C. Wu, C. Su, and G. S. Peng, "Correction of nonlinearity in one-frequency optical interferometry," Meas. Sci. Technol. 7, 520-524 (1996).
  10. T. B. Eom, J. Y. Kim, and K. Jeong, "The dynamic compensation of nonlinearity in a homodyne laser interferometer," Meas. Sci. Technol. 12, 1734-1738 (2001).
  11. P. L. Oliver and D. Serge, "Polarization compensation: a passive approach to reducing heterodyne interferometer nonlinearity," Opt. Lett. 27, 797-799 (2002).
  12. J. Stone and S. D. Phillips, "Corrections for wavelength variations in precision interferometric displacement measurements," J. Res. Natl. Inst. Stand. Technol. 101, 671-674 (1996).
  13. Spectra-Physics, Inc., Spectra-Physics Model 117A Stabilized Helium-Neon Laser Instruction Manual (Spectra-Physics, 1997), http://www.newport.com/store/product.aspx?lone=&ltwo=&id=5220&lang=1&section=Specs.

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