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Applied Optics

Applied Optics


  • Vol. 44, Iss. 17 — Jun. 10, 2005
  • pp: 3492–3498

Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system

Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qianxiang Huang, and Tomizo Kurosawa  »View Author Affiliations

Applied Optics, Vol. 44, Issue 17, pp. 3492-3498 (2005)

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The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 ( 2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 µm.

© 2005 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

Original Manuscript: February 17, 2004
Revised Manuscript: December 29, 2004
Manuscript Accepted: January 6, 2005
Published: June 10, 2005

Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qianxiang Huang, and Tomizo Kurosawa, "Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system," Appl. Opt. 44, 3492-3498 (2005)

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