The polishing performance of magnetorheological (MR) fluids prepared with a variety of magnetic and nonmagnetic ingredients was studied on four types of initial surface for chemical vapor deposition (CVD) ZnS flats from domestic and foreign sources. The results showed that it was possible to greatly improve smoothing performance of magnetorheological finishing (MRF) by altering the fluid composition, with the best results obtained for nanoalumina abrasive used with soft carbonyl iron and altered MR fluid chemistry. Surface roughness did not exceed 20 nm peak to valley and 2 nm rms after removal of 2 μm of material. The formation of orange peel and the exposure of a pebblelike structure inherent in ZnS from the CVD process were suppressed.
© 2005 Optical Society of America
Original Manuscript: September 16, 2004
Revised Manuscript: February 4, 2005
Manuscript Accepted: February 4, 2005
Published: August 1, 2005
Irina A. Kozhinova, Henry J. Romanofsky, Alexander Maltsev, Stephen D. Jacobs, William I. Kordonski, and Sergei R. Gorodkin, "Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats," Appl. Opt. 44, 4671-4677 (2005)