OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 22 — Aug. 1, 2005
  • pp: 4671–4677

Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats

Irina A. Kozhinova, Henry J. Romanofsky, Alexander Maltsev, Stephen D. Jacobs, William I. Kordonski, and Sergei R. Gorodkin  »View Author Affiliations


Applied Optics, Vol. 44, Issue 22, pp. 4671-4677 (2005)
http://dx.doi.org/10.1364/AO.44.004671


View Full Text Article

Enhanced HTML    Acrobat PDF (452 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The polishing performance of magnetorheological (MR) fluids prepared with a variety of magnetic and nonmagnetic ingredients was studied on four types of initial surface for chemical vapor deposition (CVD) ZnS flats from domestic and foreign sources. The results showed that it was possible to greatly improve smoothing performance of magnetorheological finishing (MRF) by altering the fluid composition, with the best results obtained for nanoalumina abrasive used with soft carbonyl iron and altered MR fluid chemistry. Surface roughness did not exceed 20 nm peak to valley and 2 nm rms after removal of 2 μm of material. The formation of orange peel and the exposure of a pebblelike structure inherent in ZnS from the CVD process were suppressed.

© 2005 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(240.5450) Optics at surfaces : Polishing

History
Original Manuscript: September 16, 2004
Revised Manuscript: February 4, 2005
Manuscript Accepted: February 4, 2005
Published: August 1, 2005

Citation
Irina A. Kozhinova, Henry J. Romanofsky, Alexander Maltsev, Stephen D. Jacobs, William I. Kordonski, and Sergei R. Gorodkin, "Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats," Appl. Opt. 44, 4671-4677 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-22-4671


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. L. Slater, “Infrared windows and domes materials; critical review and technology assessment,” (Advanced Materials and Processes Technology Information Analysis Center, Jan.2000), Vol. AMPT-18, pp. 1–36.
  2. H. H. Karow, Fabrication Methods for Precision Optics (Wiley, 1993), Chap. 2.
  3. C. S. Chang, J. L. He, Z. P. Lin, “The grain size effect on the empirically determined erosion resistance of CVD-ZnS,” Wear 255, 115–120 (2003). [CrossRef]
  4. K. L. Lewis, A. M. Pitt, J. A. Savage, “The mechanical properties of CVD-grown zinc sulfide and their dependence on the conditions of growth,” in Proceedings of the Ninth International Conference on Chemical Vapor Deposition. (Electrochemical Society, 1984), Vol. 84–6, pp. 530–545.
  5. S. D. Jacobs, S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, D. Golini, W. I. Kordonski, P. Dumas, S. Hogan, “Magnetorheological finishing (MRF): computer-controlled optics manufacturing,” Am. Ceram. Soc. Bull. 78(12), 42–48 (1999).
  6. D. Golini, “Precision optics manufacturing using magnetorheological finishing (MRF),” in Proceedings of the Ninth International Conference on Production Engineering, Precision Science and Technology for the Perfect Surfaces, [Japan Society for Precision engineering (JSPE), 1999], pp. 132–137.
  7. S. D. Jacobs, S. R. Arrasmith, I. A. Kozhinova, S. R. Gorodkin, L. L. Gregg, H. J. Romanofsky, T. D. Bishop, A. B. Shorey, W. I. Kordonski, “Effects of changes in fluid composition on magnetorheological finishing (MRF) of glasses and crystals,” in Initiatives of Precision Engineering at the Beginning of a Millenium,Tenth International Conference on Precision Engineering (ICPE), I. Inasaki, ed., Yokohama, Japan, 18–20 July 2001, pp. 501–505.
  8. A. B. Shorey, S. D. Jacobs, W. I. Kordonski, R. F. Gans, “Experiments and observations regarding the mechanism of glass removal in magnetorhelogical finishing,” Appl. Opt. 40, 20–33 (2001). [CrossRef]
  9. J. E. DeGroote, H. J. Romanofsky, I. A. Kozhinova, J. M. Schoen, S. D. Jacobs, “Polishing of PMMA and other optical polymers with magnetorheological finishing,” in Optical Manufacturing and Testing V, H. P. Stahl, ed., Proc. SPIE5180, 123–134 (2004). [CrossRef]
  10. II–IV, Inc. 375 Saxonburg Boulward, Saxonburg, Pa. 16025.
  11. Research Institute of Synthetic Crystal, Beijing, China.
  12. Q22Y, commercial MRF machines manufactured by QED Technologies, 1040 University Ave, Rochester, N.Y. 146070.
  13. ZYGO GPIxpHR phase-shifting interferometer system, ZYGO Corporation, Middlefield, Conn. 06455.
  14. ZYGO New View5000 white light optical profilometer, ZYGO Corporation, Middlefield, Conn. 06455.
  15. New View 5000 setting for roughness measurements with a 20× objective, 20 μm bipolar scan length, 5.0% min/mod (minimum modulation), 7 min (minimum) area size, FDA (frequency domain analysis) resolutoin: high. The reported roughness values are an average of 8–10 measurements at different sites.
  16. Corning NetOptix, Inc., 69 Island Street, Keene, N.H. 03431.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited