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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 26 — Sep. 10, 2005
  • pp: 5403–5407

Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry–Perot cavity

Youichi Bitou, Hajime Inaba, Feng-Lei Hong, Toshiyuki Takatsuji, and Atsushi Onae  »View Author Affiliations


Applied Optics, Vol. 44, Issue 26, pp. 5403-5407 (2005)
http://dx.doi.org/10.1364/AO.44.005403


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Abstract

A phase-shifting interferometry (PSI) with equal phase steps by use of a frequency-tunable diode laser and a Fabry–Perot cavity is proposed for the Carré algorithm. The measurement accuracy of the Carré algorithm depends on the equality of the phase steps. Using the Fabry–Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 5.1 × 10−5 and a measurement repeatability of λ/800.

© 2005 Optical Society of America

OCIS Codes
(050.2230) Diffraction and gratings : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: February 18, 2005
Manuscript Accepted: April 14, 2005
Published: September 10, 2005

Citation
Youichi Bitou, Hajime Inaba, Feng-Lei Hong, Toshiyuki Takatsuji, and Atsushi Onae, "Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry–Perot cavity," Appl. Opt. 44, 5403-5407 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-26-5403

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