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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 26 — Sep. 10, 2005
  • pp: 5446–5453

Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region

Takeo Ejima, Atsushi Yamazaki, Takanori Banse, Katsuhiko Saito, Yuji Kondo, Satoshi Ichimaru, and Hisataka Takenaka  »View Author Affiliations


Applied Optics, Vol. 44, Issue 26, pp. 5446-5453 (2005)
http://dx.doi.org/10.1364/AO.44.005446


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Abstract

Reflection measurements in the 25–35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10° of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10°. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400 °C at 50 °C intervals. Both multilayers keep their reflectance at annealing temperatures of 200 °C. These results suggest that both Mg-based multilayers can be applied to practical optics.

© 2005 Optical Society of America

OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors

History
Original Manuscript: November 17, 2004
Revised Manuscript: March 30, 2005
Manuscript Accepted: April 29, 2005
Published: September 10, 2005

Citation
Takeo Ejima, Atsushi Yamazaki, Takanori Banse, Katsuhiko Saito, Yuji Kondo, Satoshi Ichimaru, and Hisataka Takenaka, "Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region," Appl. Opt. 44, 5446-5453 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-26-5446

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