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Applied Optics

Applied Optics


  • Vol. 44, Iss. 27 — Sep. 20, 2005
  • pp: 5786–5792

Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing

Stephan Reichelt and Hans Zappe  »View Author Affiliations

Applied Optics, Vol. 44, Issue 27, pp. 5786-5792 (2005)

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A new interferometer design for microlens testing is presented. The phase-shifting system combines the advantages of a Twyman-Green and a Mach-Zehnder interferometer and permits full characterization of the aberrations of microlenses as well as radius of curvature and focal length measurements. The Twyman-Green system is applied to surface testing in reflection (single reflection), whereas the Mach-Zehnder system is used for lens testing in transmission (single pass). Both measurements are performed without removal of the test part, allowing for combination of the results without confusion of the actual lens and without an azimuthal orientation error. The interferometer setup is explained, the test procedure is described, and experimental results are given.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(220.4840) Optical design and fabrication : Testing
(350.3950) Other areas of optics : Micro-optics

Stephan Reichelt and Hans Zappe, "Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing," Appl. Opt. 44, 5786-5792 (2005)

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