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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 27 — Sep. 20, 2005
  • pp: 5786–5792

Combined Twyman–Green and Mach–Zehnder interferometer for microlens testing

Stephan Reichelt and Hans Zappe  »View Author Affiliations


Applied Optics, Vol. 44, Issue 27, pp. 5786-5792 (2005)
http://dx.doi.org/10.1364/AO.44.005786


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Abstract

A new interferometer design for microlens testing is presented. The phase-shifting system combines the advantages of a Twyman–Green and a Mach–Zehnder interferometer and permits full characterization of the aberrations of microlenses as well as radius of curvature and focal length measurements. The Twyman–Green system is applied to surface testing in reflection (single reflection), whereas the Mach–Zehnder system is used for lens testing in transmission (single pass). Both measurements are performed without removal of the test part, allowing for combination of the results without confusion of the actual lens and without an azimuthal orientation error. The interferometer setup is explained, the test procedure is described, and experimental results are given.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(220.4840) Optical design and fabrication : Testing
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: January 20, 2005
Revised Manuscript: April 26, 2005
Manuscript Accepted: April 26, 2005
Published: September 20, 2005

Citation
Stephan Reichelt and Hans Zappe, "Combined Twyman–Green and Mach–Zehnder interferometer for microlens testing," Appl. Opt. 44, 5786-5792 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-27-5786


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References

  1. M. C. Hutley, “Manufacture and testing of microlens arrays,” in Optics in Complex Systems, F. Lanzl, G. Weigelt, eds., Proc. SPIE1319, 491–492 (1990). [CrossRef]
  2. M. C. Hutley, D. J. Daly, R. F. Stevens, The Testing of Microlens Arrays, Vol. 30 of IOP Short Meeting Series (IOP Publishing, 1991), pp. 67–81.
  3. P. Nussbaum, R. Völkel, H. P. Herzig, M. Eisner, S. Haselbeck, “Design, fabrication and testing of microlens arrays for sensors and microsystems,” Pure Appl. Opt. 6, 617–636 (1997). [CrossRef]
  4. D. Daly, Microlens Arrays (Taylor & Francis, 2001).
  5. W. Moench, H. Zappe, “Fabrication and testing of microlens arrays by all-liquid techniques,” J. Opt. A Pure Appl. Opt. 6, 330–337 (2004). [CrossRef]
  6. K. O. Mersereau, R. J. Crisci, C. R. Nijander, W. P. Townsend, D. J. Daly, M. C. Hutley, “Testing and measurement of microlenses,” in Miniature and Micro-Optics and Micromechanics, N. C. Gallagher, C. S. Roychoudhuri, eds., Proc. SPIE1992, 210–215 (1993). [CrossRef]
  7. J. Schwider, H. Sickinger, “Array test for microlenses,” Optik 107, 26–34 (1997).
  8. J. Schwider, N. Lindlein, R. Schreiner, J. Lamprecht, G. Leuchs, J. Pfund, M. Beyerlein, “Optikprüfung von refraktiven Mikrolinsen,” Tech. Messen 69, 467–482 (2002).
  9. J. Schwider, O. Falkenstörfer, “Twyman–Green interferometer for testing microspheres,” Opt. Eng. 34, 2972–2975 (1995). [CrossRef]
  10. L. Falco, J.-C. Vuilleumier, E. Muharemovic, “Automated Twyman–Green interferometer for micro-lens arrays characterization,” presented at the 10th Microoptics Conference, Jena, Germany, 1–3 September 2004.
  11. D. J. Daly, M. C. Hutley, R. F. Stevens, “Mach Zehnder interferometer for measuring microlenses,” in Interferometry ’94: New Techniques and Analysis in Optical Measurements, M. Kujawinska, K. Patorski, eds., Proc. SPIE2340, 258–263 (1994).
  12. H. Sickinger, J. Schwider, B. Manzke, “Fiber based Mach–Zehnder interferometer for measuring wave aberrations of microlenses,” Optik 110, 239–243 (1999).
  13. T. Miyashita, K. Hamanaka, M. Kato, S. Ishihara, H. Sato, E. Sato, T. Morokuma, “Wavefront aberration measurement technology for microlens using the Mach–Zehnder interferometer provided with a projected aperture,” in Interferometry XII: Applications, W. Osten, E. Novak, eds., Proc. SPIE5532, 117–127 (2004). [CrossRef]
  14. W. Krug, E. Lau, “Ein Interferenzmikroskop für Durchund Auflichtbeobachtungen,” Annalen der Physik 6, 329–340 (1951).
  15. H. Sickinger, O. Falkenstörfer, N. Lindlein, J. Schwider, “Characterization of microlenses using a phase-shifting shearing interferometer,” Opt. Eng. 33, 2680–2668 (1994). [CrossRef]
  16. J. H. Burning, D. R. Herriott, “A versatile laser interderometer,–,” Appl. Opt. 9, 2180–2182 (1970). [CrossRef]
  17. A. E. Jensen, “Absolute calibration method for laser Twyman–Green wavefront testing interferometers,” J. Opt. Soc. Am. 63, 1313A (1973) (abstract only).
  18. P. Manns, G. Kleer, W. Döll, “Heissprägung von Mikrostrukturen in anorganische Gläser für Anwendungen in der optischen Sensorik,” in Kurzreferate Glastechnische Tagung (Glastechnische Gesellschaft, 2000), pp. 102–106.
  19. K. Creath, J. C. Wyant, “Testing spherical surfaces: a fast, quasi-absolute technique,” Appl. Opt. 31, 4350–4354 (1992). [CrossRef] [PubMed]
  20. C. J. Evans, R. E. Parks, P. J. Sullivan, J. S. Taylor, “Visualization of surface figure by the use of Zernike polynomials,” Appl. Opt. 34, 7815–7819 (1995). [CrossRef] [PubMed]

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