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Applied Optics

Applied Optics


  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 28 — Oct. 1, 2005
  • pp: 5919–5927

Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu  »View Author Affiliations

Applied Optics, Vol. 44, Issue 28, pp. 5919-5927 (2005)

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Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.

© 2005 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy

ToC Category:

Original Manuscript: January 4, 2005
Revised Manuscript: April 25, 2005
Manuscript Accepted: May 16, 2005
Published: October 1, 2005

Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu, "Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry," Appl. Opt. 44, 5919-5927 (2005)

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