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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 28 — Oct. 1, 2005
  • pp: 5919–5927

Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu  »View Author Affiliations


Applied Optics, Vol. 44, Issue 28, pp. 5919-5927 (2005)
http://dx.doi.org/10.1364/AO.44.005919


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Abstract

Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.

© 2005 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy

ToC Category:
Interferometry

History
Original Manuscript: January 4, 2005
Revised Manuscript: April 25, 2005
Manuscript Accepted: May 16, 2005
Published: October 1, 2005

Citation
Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu, "Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry," Appl. Opt. 44, 5919-5927 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-28-5919


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References

  1. T. V. Vorburger, J. Fu, N. Orji, “In the rough,” oe Magazine (March)31–34 (2002).
  2. J. Song, T. V. Vorburger, “Stylus profiling at high resolution and low force,” Appl. Opt. 30, 42–50 (1991). [CrossRef] [PubMed]
  3. J. E. Greivenkamp, J. H. Bruning, “Phase shifting interferometers,” in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 501–598.
  4. G. S. Kino, S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990). [CrossRef] [PubMed]
  5. L. Deck, P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef] [PubMed]
  6. J. Schmit, A. Olszak, “High-precision shape measurement by white-light interferometry with real time scanner correction,” Appl. Opt. 41, 5943–5950 (2002). [CrossRef] [PubMed]
  7. A. Harasaki, J. Schmit, J. C. Wyant, “Improved vertical-scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000). [CrossRef]
  8. A. Harasaki, J. C. Wyant, “Fringe modulation skewing effect in white-light vertical scanning interferometry,” Appl. Opt. 39, 2101–2106 (2000). [CrossRef]
  9. T. Dresler, G. Häusler, H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  10. B. Wang, S. P. Marchese-Ragona, T. C. Bristow, “Roughness characterization of ultrasmooth surfaces using common path interferometry,” Proc. SPIE 3619, 121–127 (1999). [CrossRef]
  11. G. Binnig, C. F. Quate, Ch. Gerber, “Atomic force microscope,” Phys. Rev. Lett. 56, 930–933 (1986). [CrossRef] [PubMed]
  12. J. C. Wyant, K. Creath, “Recent advances in interferometric optical testing,” Laser Focus Electro-Optics 21, 118–132 (1985).
  13. P. Hariharan, M. Roy, “White-light phase-stepping interferometry: measurement of the fractional interference order,” J. Mod. Opt. 42, 2357–2360 (1995). [CrossRef]
  14. A. Olszak, “Lateral scanning white-light interferometer,” Appl. Opt. 39, 3906–3913 (2000). [CrossRef]
  15. A. Olszak, J. Schmit, “High-stability white-light interferometry with reference signal for real-time correction of scanning errors,” Opt. Eng. 42, 54–59 (2003). [CrossRef]
  16. P. de Groot, X. C. de Lega, J. Kramer, M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002). [CrossRef] [PubMed]
  17. “Surface texture, surface roughness, waviness, and lay,” (American Society of Mechanical Engineers, 2003), pp. 6–12.
  18. P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  19. K. G. Larkin, “Effective nonlinear algorithm for envelope detection in white light interferometry,” J. Opt. Soc. Am. A 13, 832–843 (1996). [CrossRef]
  20. P. Sandoz, “Wavelet transform as a processing tool in white-light interferometry,” Opt. Lett. 22, 1065–1067 (1997). [CrossRef] [PubMed]
  21. T. Doi, T. V. Vorburger, P. J. Sullivan, “Effects of defocus and algorithm on optical step height calibration,” Precis. Eng. 23, 135–143 (1999). [CrossRef]
  22. J. F. Song, T. V. Vorburger, “Standard reference specimens in quality control of engineering surfaces,” J. Res. Natl. Inst. Stand. Technol. 96, 271–289 (1991). [CrossRef]
  23. Information about the specimens is available at www.rubert.co.uk .
  24. Certain commercial materials are identified in this paper to specify adequately an experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that materials are necessarily the best available for the purpose.
  25. A. Jendral, O. Bryngdahl, “Synthetic near-field holograms with localized information,” Opt. Lett. 20, 1204–1206 (1995). [CrossRef] [PubMed]
  26. M. G. Moharam, E. B. Grann, D. A. Pommet, T. K. Gayload, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12, 1077–1086 (1995). [CrossRef]
  27. A. Tavrov, M. Totzeck, N. Kerwien, H. J. Tiziani, “Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio,” Opt. Eng. 41, 1886–1892 (2002). [CrossRef]

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