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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 29 — Oct. 10, 2005
  • pp: 6093–6107

Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

Sven Schröder, Stefan Gliech, and Angela Duparré  »View Author Affiliations


Applied Optics, Vol. 44, Issue 29, pp. 6093-6107 (2005)
http://dx.doi.org/10.1364/AO.44.006093


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Abstract

An instrumentation for total and angle-resolved scattering (ARS) at 193 and 157 nm has been developed at the Fraunhofer Institute in Jena to meet the severe requirements for scattering analysis of deep- and vacuum-ultraviolet optical components. Extremely low backscattering levels of 10^−6 for the total scattering measurements and more than 9 orders of magnitude dynamic range for ARS have been accomplished. Examples of application extend from the control of at-wavelength scattering losses of superpolished substrates with rms roughness as small as 0.1 nm to the detection of volume material scattering and the study into the scattering of multilayer coatings. In addition, software programs were developed to model the roughness-induced light scattering of substrates and thin-film coatings.

© 2005 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(160.4670) Materials : Optical materials
(260.7190) Physical optics : Ultraviolet
(290.5820) Scattering : Scattering measurements
(310.1620) Thin films : Interference coatings

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
Sven Schröder, Stefan Gliech, and Angela Duparré, "Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions," Appl. Opt. 44, 6093-6107 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-29-6093


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