OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 29 — Oct. 10, 2005
  • pp: 6093–6107

Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

Sven Schröder, Stefan Gliech, and Angela Duparré  »View Author Affiliations


Applied Optics, Vol. 44, Issue 29, pp. 6093-6107 (2005)
http://dx.doi.org/10.1364/AO.44.006093


View Full Text Article

Enhanced HTML    Acrobat PDF (1815 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An instrumentation for total and angle-resolved scattering (ARS) at 193 and 157 nm has been developed at the Fraunhofer Institute in Jena to meet the severe requirements for scattering analysis of deep-and vacuum-ultraviolet optical components. Extremely low backscattering levels of 10−6 for the total scattering measurements and more than 9 orders of magnitude dynamic range for ARS have been accomplished. Examples of application extend from the control of at-wavelength scattering losses of superpolished substrates with rms roughness as small as 0.1 nm to the detection of volume material scattering and the study into the scattering of multilayer coatings. In addition, software programs were developed to model the roughness-induced light scattering of substrates and thin-film coatings.

© 2005 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(160.4670) Materials : Optical materials
(260.7190) Physical optics : Ultraviolet
(290.5820) Scattering : Scattering measurements
(310.1620) Thin films : Interference coatings

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 27, 2005
Revised Manuscript: May 27, 2005
Manuscript Accepted: June 8, 2005
Published: October 10, 2005

Citation
Sven Schröder, Stefan Gliech, and Angela Duparré, "Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions," Appl. Opt. 44, 6093-6107 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-29-6093

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited