We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupled-waveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10−4 deg.
© 2005 Optical Society of America
Original Manuscript: March 15, 2005
Revised Manuscript: May 22, 2005
Manuscript Accepted: May 24, 2005
Published: October 10, 2005
Jenq-Nan Yih, Fan-Ching Chien, Chun-Yun Lin, Hon-Fai Yau, and Shean-Jen Chen, "Angular-interrogation attenuated total reflection metrology system for plasmonic sensors," Appl. Opt. 44, 6155-6162 (2005)