A total integrated scattering (TIS) measurement was performed to investigate the surface and volume scattering of K9 glass substrates with low reflectance. Ag layers with thicknesses of 60 nm were deposited on the front and back surfaces of the K9 glass substrates by the magnetron sputtering technique. Surface scattering of the K9 glass substrate was obtained by the TIS measurement of the Ag layers on the assumption that the Ag layers and the K9 substrate had the same surface profile. Volume scattering of the substrates was deduced by subtracting the front and back surface scattering from the total scattering of the substrates.
© 2005 Optical Society of America
(030.5770) Coherence and statistical optics : Roughness
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(290.0290) Scattering : Scattering
(310.0310) Thin films : Thin films
Haihong Hou, Kui Yi, Shuzhen Shang, Jianda Shao, and Zhengxiu Fan, "Measurements of light scattering from glass substrates by total integrated scattering," Appl. Opt. 44, 6163-6166 (2005)