OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 29 — Oct. 10, 2005
  • pp: 6163–6166

Measurements of light scattering from glass substrates by total integrated scattering

Haihong Hou, Kui Yi, Shuzhen Shang, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations

Applied Optics, Vol. 44, Issue 29, pp. 6163-6166 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (61 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A total integrated scattering (TIS) measurement was performed to investigate the surface and volume scattering of K9 glass substrates with low reflectance. Ag layers with thicknesses of 60 nm were deposited on the front and back surfaces of the K9 glass substrates by the magnetron sputtering technique. Surface scattering of the K9 glass substrate was obtained by the TIS measurement of the Ag layers on the assumption that the Ag layers and the K9 substrate had the same surface profile. Volume scattering of the substrates was deduced by subtracting the front and back surface scattering from the total scattering of the substrates.

© 2005 Optical Society of America

OCIS Codes
(030.5770) Coherence and statistical optics : Roughness
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(290.0290) Scattering : Scattering
(310.0310) Thin films : Thin films

ToC Category:

Original Manuscript: March 18, 2005
Revised Manuscript: May 19, 2005
Manuscript Accepted: May 20, 2005
Published: October 10, 2005

Haihong Hou, Kui Yi, Shuzhen Shang, Jianda Shao, and Zhengxiu Fan, "Measurements of light scattering from glass substrates by total integrated scattering," Appl. Opt. 44, 6163-6166 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. H. Guenther, H. L. Gruber, H. K. Pulker, “Morphology and light scattering of dielectric multilayer systems,” Thin Solid Films 34, 363–367 (1976). [CrossRef]
  2. C. K. Carniglia, “Scalar scattering theory for multilayer optical coatings,” Opt. Eng. 18, 104–114 (1979). [CrossRef]
  3. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, J. Neuber, “Light scattering from the volume of optical thin films: theory and experiment,” Appl. Opt. 31, 1304–1313 (1992). [CrossRef] [PubMed]
  4. P. Bussemer, K. Hehl, S. Kassam, “Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack,” Wave Random Media 1, 207–221 (1991). [CrossRef]
  5. C. Kylner, L. Mattsson, “Enhanced optical performance of aluminum films by copper inclusion,” Thin Solid Films 348, 222–226 (1999). [CrossRef]
  6. A. Duparré, S. Kassam, “Relation between light scattering and the microstructure of optical thin films,” Appl. Opt. 32, 5475–5480 (1993). [CrossRef] [PubMed]
  7. J. M. Bennett, “Comparison of techniques for measuring the roughness of optical surfaces,” Opt. Eng. 24, 380–387 (1985). [CrossRef]
  8. J. M. Elson, J. P. Rahn, J. M. Bennett, “Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties,” Appl. Opt. 22, 3207–3219 (1983). [CrossRef] [PubMed]
  9. C. Amra, P. Bousquet, “Scattering from surfaces and multilayer coatings: recent advances for a better investigation of experiment,” Proc. Soc. Photo-Opt. Instrum. Eng. 1009, 82–97 (1998).
  10. K. H. Guenther, P. G. Wierer, J. M. Bennett, “Surface roughness measurement of low-scatter mirrors and roughness standards,” Appl. Opt. 23, 3820–3836 (1984). [CrossRef]
  11. C. F. Hickey, C. Amra, E. Pelletier, “Scattering study of single layer titania films,” Appl. Opt. 28, 2754–2761 (1989). [CrossRef] [PubMed]
  12. P. Beckmann, A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, 1963).
  13. A. V. Tikhonravov, M. K. Trubetskov, A. A. Tikhonravov, A. Duparré, “Impact of surface roughness on spectral properties of thin films and multilayers,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2001), pp. THB5-1–THB5-3.
  14. Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. Andre, R. Galindo, F. Salvan, “Quantitative microroughness analysis down to the nanometer scale,” Europhys. Lett. 22, 717–722 (1993). [CrossRef]
  15. J. M. Bennett, J. Jahannir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 34, 213–230 (1995). [CrossRef] [PubMed]
  16. A. Duparré, N. Kaiser, H. Truckenbrodt, M. Berger, A. Köhler, “Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and atomic force microscopy,” Proc. SPIE 1995, 181–192 (1993). [CrossRef]
  17. C. Amra, C. Denmie, D. Torricini, P. Roche, R. Galindo, P. Dumas, F. Salvan, “Overlapping of roughness spectra measured in macroscopic (optical) and mocroscopic (AFM) bandwidths,” Proc. SPIE 2253, 614–630 (1994). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited