OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 29 — Oct. 10, 2005
  • pp: 6176–6180

Ion-assisted sputtering deposition of antireflection film coating for flexible liquid-crystal display applications

Jyh-Jier Ho, Chin-Ying Chen, Chao-Ming Huang, William J. Lee, Wan-Rone Liou, and Chung-Chang Chang  »View Author Affiliations


Applied Optics, Vol. 44, Issue 29, pp. 6176-6180 (2005)
http://dx.doi.org/10.1364/AO.44.006176


View Full Text Article

Acrobat PDF (1162 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The optical properties and surface morphologies of sputtering films both without and with use of the ion-assisted deposition (IAD) technique are investigated and compared. Optimal antireflection (AR) coating films with SiO2/Nb2O5 layers, which are grown at 80 °C with a 15 cm distance between target and substrate, 55 SCCM oxygen flow (SCCM denotes cubic centimeters per minute at STP), and 1250 W magnetron sputtering power with use of the IAD technique, are used to study the optical performance. By using an atomic force microscope to investigate the surface of the sputtered Nb2O5 films, we find that the films/ roughness is 0.185 nm. On a flexible hardness polycarbonate (HPC) substrate with the multilayer AR films, the peak transmittances measured in the visible range are 95.89% and 93.40%, respectively, for coatings with and without use of the IAD sputtering technology. These results are better than those measured with a bare HPC substrate (91.25%) and are well above the commercial liquid-crystal display standard (90%) and flexible application.

© 2005 Optical Society of America

OCIS Codes
(250.0250) Optoelectronics : Optoelectronics
(310.1210) Thin films : Antireflection coatings

ToC Category:
Thin Films

Citation
Jyh-Jier Ho, Chin-Ying Chen, Chao-Ming Huang, William J. Lee, Wan-Rone Liou, and Chung-Chang Chang, "Ion-assisted sputtering deposition of antireflection film coating for flexible liquid-crystal display applications," Appl. Opt. 44, 6176-6180 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-29-6176

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited