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Applied Optics

Applied Optics


  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 29 — Oct. 10, 2005
  • pp: 6181–6185

Substrate temperature effect on the refractive index and a two-step film method to detect small inhomogeneities in optical films

Fachun Lai, Ming Li, Kang Chen, Haiqian Wang, Yizhou Song, and Yousong Jiang  »View Author Affiliations

Applied Optics, Vol. 44, Issue 29, pp. 6181-6185 (2005)

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Nb2O5 films were deposited by a reactive magnetron sputtering technique. The average refractive index was found to increase with the rise of substrate temperature. Modulated interference transmittance spectra were observed in the two-step films, which were prepared by stopping the deposition process in the middle of the designed sputtering time, and then, after a full cooling down to room temperature, starting the same deposition process again to complete the whole preparation of the films. A linearly graded-index model was used to explain the interference behavior. It was proved that the two-step film method was sensitive to the small inhomogeneity in the films. We also suggest that the inhomogeneity of sputtered films can be minimized by controlling the substrate temperature at a constant value.

© 2005 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: November 29, 2004
Revised Manuscript: May 26, 2005
Manuscript Accepted: May 30, 2005
Published: October 10, 2005

Fachun Lai, Ming Li, Kang Chen, Haiqian Wang, Yizhou Song, and Yousong Jiang, "Substrate temperature effect on the refractive index and a two-step film method to detect small inhomogeneities in optical films," Appl. Opt. 44, 6181-6185 (2005)

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