We present a method to independently measure the refractive index and the thickness of materials having flat and parallel sides by using a combination of Michelson and Fabry-Perot interferometry techniques. The method has been used to determine refractive-index values in the infrared with uncertainties in the third decimal place and thicknesses accurate to within ± 5 µm for materials at room and cryogenic temperatures.
© 2005 Optical Society of America
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(160.4760) Materials : Optical properties
Glen D. Gillen and Shekhar Guha, "Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers," Appl. Opt. 44, 344-347 (2005)