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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 3 — Jan. 20, 2005
  • pp: 344–347

Use of Michelson and Fabry–Perot interferometry for independent determination of the refractive index and physical thickness of wafers

Glen D. Gillen and Shekhar Guha  »View Author Affiliations


Applied Optics, Vol. 44, Issue 3, pp. 344-347 (2005)
http://dx.doi.org/10.1364/AO.44.000344


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Abstract

We present a method to independently measure the refractive index and the thickness of materials having flat and parallel sides by using a combination of Michelson and Fabry–Perot interferometry techniques. The method has been used to determine refractive-index values in the infrared with uncertainties in the third decimal place and thicknesses accurate to within ±5 μm for materials at room and cryogenic temperatures.

© 2005 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(160.4760) Materials : Optical properties

History
Original Manuscript: May 6, 2004
Revised Manuscript: September 24, 2004
Manuscript Accepted: October 13, 2004
Published: January 20, 2005

Citation
Glen D. Gillen and Shekhar Guha, "Use of Michelson and Fabry–Perot interferometry for independent determination of the refractive index and physical thickness of wafers," Appl. Opt. 44, 344-347 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-3-344

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