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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 3 — Jan. 20, 2005
  • pp: 344–347

Use of Michelson and Fabry–Perot interferometry for independent determination of the refractive index and physical thickness of wafers

Glen D. Gillen and Shekhar Guha  »View Author Affiliations


Applied Optics, Vol. 44, Issue 3, pp. 344-347 (2005)
http://dx.doi.org/10.1364/AO.44.000344


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Abstract

We present a method to independently measure the refractive index and the thickness of materials having flat and parallel sides by using a combination of Michelson and Fabry–Perot interferometry techniques. The method has been used to determine refractive-index values in the infrared with uncertainties in the third decimal place and thicknesses accurate to within ±5 μm for materials at room and cryogenic temperatures.

© 2005 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(160.4760) Materials : Optical properties

History
Original Manuscript: May 6, 2004
Revised Manuscript: September 24, 2004
Manuscript Accepted: October 13, 2004
Published: January 20, 2005

Citation
Glen D. Gillen and Shekhar Guha, "Use of Michelson and Fabry–Perot interferometry for independent determination of the refractive index and physical thickness of wafers," Appl. Opt. 44, 344-347 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-3-344


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References

  1. C. A. Proctor, “Index of refraction and dispersion with the interferometer,” Phys. Rev. 24, 195–201 (1907).
  2. M. S. Shumate, “Interferometric measurement of large indices of refraction,” Appl. Opt. 5, 327–331 (1966). [CrossRef] [PubMed]
  3. U. Schlarb, K. Betzler, “Influence of the defect structure on the refractive indices of undoped and Mg-doped lithium niobate,” Phys. Rev. B 50, 751–757 (1994). [CrossRef]
  4. J. F. H. Nicholls, B. Henderson, B. H. T. Chai, “Accurate determination of the indices of refraction of nonlinear optical crystals,” Appl. Opt. 36, 8587–8594 (1997). [CrossRef]
  5. J. C. Brasunas, G. M. Curshman, “Interferometric but nonspectroscopic technique for measuring the thickness of a transparent plate,” Opt. Eng. 34, 2126–2130 (1995). [CrossRef]
  6. G. Coppala, P. Ferraro, M. Iodice, S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42, 3882–3887 (2003). [CrossRef]
  7. M. Born, E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, Cambridge, UK, 2002).
  8. G. D. Gillen, S. Guha, “Refractive-index measurements of zinc germanium diphosphide at 300 and 77 K by use of a modified Michelson interferometer,” Appl. Opt. 43, 2054–2058 (2004). [CrossRef] [PubMed]
  9. G. Hawkins, R. Hunneman, “The temperature-dependent spectral properties of filter substrate materials in the far-infrared (6–40 μm),” Infrared Phys. Technol. 45, 69–79 (2004). [CrossRef]
  10. E. D. Palik, Handbook of Optical Constants of Solids (Academic, New York, 1998).
  11. I. S. Grigoriev, E. Z. Meilikhov, Handbook of Physical Quantities (CRC Press, Boca Raton, Fla., 1997).
  12. V. Kumar, B. S. R. Sastry, “Thermal expansion coefficient of binary semiconductors,” Cryst. Res. Technol. 36, 565–569 (2001). [CrossRef]

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